11
EDH0316En1031 — 11/18
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
6.0 —
Connection to Non-Newport Electronics
6.1
Connections
WARNING
Newport is not responsible for malfunction or damage of ZVR stages
when used with non-Newport controllers.
WARNING
Newport guarantees
“
”
compliance of ZVR stages only if used with
Newport cables and controllers.
It is the customer's responsibility to modify the cable and take care of
sensor signal connections, when using the stage with non-Newport
controllers.
End-of-Runs and Mechanical Zero are open collector type with a 5.6 V
protective Zener diode.
I
in
max.: 16 mA
V max.: 5.25 V
NEWPORT
STAGE
5.6 V
