7
EDH0316En1031 — 11/18
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
4.4
Feedback Signal Position
The incremental sensor consists of an optical scale and an encoder head.
When the carriage moves, the encoder head generates square signals in
quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25
connector.
“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type
output signals. Using these signals permits a high immunity to noise.
Emission circuits generally used by Newport are 26LS31 or MC3487.
Reception circuits to use are 26LS32 or MC3486.
4.5
Pinouts
The pinout diagrams for the ZVR stages SUB-D15M connectors are shown
below.
Dir
0
1
Encoder
Phase A
0
1
Encoder
Phase A
1
2
3
4
0
1
Encoder
Phase B
0
1
Encoder
Phase B
Direction –
MOTION
Dir
SUD-D25 OR SUB-D15
Encoder Phase A
19
13
Encoder Phase A
23
6
Encoder Phase B
20
14
Encoder Phase B
24
7
Index Pulse Phase I
15
15
Index Pulse Phase I
25
8
21
12
22
5
NEWPORT
STAGE
USER
CONNECTOR PIN #
Output Signals
Encoders
& Sensors
Power Supply
+5 V 5%
150 mA max.
0 V
}
8
15
9
1
ZVR-PP
(Rotation Axis)
1
+ Phase 1
2
+ Phase 2
3
Mechanical Zero
4
– End-of-Run
5
0 V
6
N.C.
7
N.C.
8
N.C.
9
– Phase 1
10
– Phase 2
11
+ End-of-Run
12
+5 V
13
N.C.
14
N.C.
15
N.C.
ZVR-PP & ZVR-PC
(Vertical Axis)
1
+ Phase 1
2
+ Phase 2
3
Mechanical Zero
4
– End-of-Run
5
0 V
6
N.C.
7
N.C.
8
N.C.
9
– Phase 1
10
– Phase 2
11
+ End-of-Run
12
+5 V
13
N.C.
14
N.C.
15
N.C.
ZVR-PC
(Rotation Axis)
1
N.C.
2
+ Motor
3
Mechanical Zero
4
– End-of-Run
5
0 V
6
Encoder Phase /A
7
Encoder Phase /B
8
Index Pulse /I
9
N.C.
10
– Motor
11
+ End-of-Run
12
+5 V
13
Encoder Phase A
14
Encoder Phase B
15
Index Pulse I
