EDH0316En1031 — 11/18
12
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
7.0 —
Disabling Limit Switches of the Rotation Axis
The rotation stage of the ZVR is equipped with optical limit switches set to
±165°. These limit switches can be disabled for continuous 360° rotation.
WARNING
The movement of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
NOTE
To access and activate or inhibit the limit switches, the Z-stage of the
ZVR must be in its highest position.
Disconnect the ZVR, then set the limit switch as required.
ACTIVED LIMIT SWITCHES:
±165° TRAVEL
INHIBITED LIMIT SWITCHES:
CONTINUOUS TRAVEL
