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EDH0316En1031 — 11/18
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
ZVR Series
EU Declaration of Conformity
following Annex II-1A
of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics,
9, rue du Bois Sauvage
91055 Évry CEDEX, FRANCE
Hereby declares that the machinery:
y
Description: " ZVR"
y
Function: Integrated Vertical and Rotation Stage for Wafer Positioning
y
Models: ZVR-PC/-PP
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France
– complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
– was designed and built in accordance with the following harmonised standards:
y
NF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
y
NF EN 55011:2010/A1:2011 Class A
– was designed and built in accordance with the following other standards:
y
NF EN 61000-4-2
y
NF EN 61000-4-3
y
NF EN 61000-4-4
y
NF EN 61000-4-5
y
NF EN 61000-4-6
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director
DC1-EN rev:A
EC Declaration of Conformity
