EDH0316En1031 — 11/18
8
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
4.6
MCAB-3 Cable
Two 3-meter MCAB-3 cables are supplied with each ZVR stage (see section
5.3: ”Cables”).
CONNECTED
TO THE CAP
CONNECTED
TO THE CAP
SUB-D25M
CONNECTOR
1
2
3
4
5
6
7
8
14
22
21
16
19
23
20
24
15
25
17
18
13
SUB-D25F
CONNECTOR
1
2
3
4
5
6
7
8
14
22
21
16
19
23
20
24
15
25
17
18
13
(0.6 MM
2
) WHITE 1
(0.6 MM
2
) WHITE 2
(0.6 MM
2
) WHITE 3
(0.6 MM
2
) WHITE 4
(0.6 MM
2
) WHITE 6
(0.6 MM
2
) WHITE 7
(0.6 MM
2
) WHITE 8
(0.6 MM
2
) WHITE 9
(0.6 MM
2
) WHITE 5
(0.6 MM
2
) WHITE 10
(0.6 MM
2
) WHITE 11
(0.6 MM
2
) WHITE 12
(0.09 MM
2
) WHITE
(0.09 MM
2
) BROWN
(0.09 MM
2
) GREEN
(0.09 MM
2
) YELLOW
(0.09 MM
2
) GREY
(0.09 MM
2
) PINK
(0.09 MM
2
) BLUE
(0.09 MM
2
) RED
(0.09 MM
2
) BLACK
(0.09 MM
2
) PURPLE
(0.09 MM
2
) ORANGE
(0.09 MM
2
) BLUE
(AWG20) WHITE 1
(AWG20) WHITE 2
(AWG20) WHITE 3
(AWG20) WHITE 4
(AWG20) WHITE 6
(AWG20) WHITE 7
(AWG20) WHITE 8
(AWG20) WHITE 9
(AWG20) WHITE 5
(AWG20) WHITE 10
(AWG20) WHITE 11
(AWG20) WHITE 12
(AWG28) WHITE
(AWG28) BROWN
(AWG28) GREEN
(AWG28) YELLOW
(AWG28) GREY
(AWG28) PINK
(AWG28) BLUE
(AWG28) RED
(AWG28) BLACK
(AWG28) PURPLE
(AWG28) ORANGE
(AWG28) BLUE
