EDH0316En1031 — 11/18
10
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
5.2
Connection
There is a label on every stage indicating its part and serial numbers.
WARNING
Always turn the controller's power OFF before connecting to a stage.
NOTE
These stages are ESP compatible. Enhanced System Performance is
Newport's exclusive technology that enables Newport ESP motion
controllers to recognize the connected Newport ESP stage and upload
the stage parameters. This ensures that the user can operate the motion
system quickly and safely.
5.3
Cables
All ZVR stages are delivered with two
MSCABLE-3
3-meter cables with a
SUB-D25M connector for direct connection to Newport Controllers.
5.4
MSCABLE-3 Cable
CABLE
CONNECTOR
STAGE
BENDING
STATIC CABLE:
≥
.94 (24)
CABLE IN MOTION:
≥
2.76 (70)
LOCKING
KNOBS
2.24 (57)
DISCONNECTED
ø.24
(6)
SUB-D15 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
WARNING
This cable is shielded correctly. For a correct operation, make sure to
lock connectors (ground continuity provided by the cable).
For applications where the standard 3-meter cable (
MSCABLE-3
) included
with your stage is not adequate, Newport offers a 10-m longer length cable
(
MSCABLE-10
) designed to ensure the integrity of your positioning
application.
REMARK
The cross section of the MSCAB-10 cable is different from the one of the
MSCABLE-3 cable to allow a longer length. The MSCAB-10 cable has the
same mechanical properties as the MCAB-10 cable.
These cables are specially shielded and terminated with Newport’s
standard SUB-D15 and SUB-D25 connectors.
WARNING
Keep the motor cables at a safe distance from other electrical cables in
your environment to avoid potential cross talk.
