MKS T3PIA, Instruction Manual, Page: 50 / 70

Chapter Five: Maintenance and Troubleshooting Preventive Maintenance
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Table 22: Valve Cover Screw Torque
Nominal Size Maximum Torque
mm inch Nm lbf-in
160-320 6-12 6 50
100 4 4 35
12. If, and only if, this valve is controlled via an analog/TTL I/O interface, change the “Control Mode” on the
top of the valve to the “Run” position.
13. If this valve is controlled via DeviceNet or Analog/TTL, at the Pendulum Maintenance Mode Screen,
select the “ Close Valve ” command.
14. If, and only if, this valve is controlled via an analog/TTL I/O interface, depress the “Close” switch on the
top of the valve.
15. At the Pendulum Maintenance Mode Screen , select the “ Select Pressure Control Mode ” command.
Software Commands
Table 23: Software Command Reference
Command Analog/TTL I/O
“Select Position Control Mode” Select position control mode by setting the logic level on the
AUX I/O connector pin 5 LOW
“Move Gate to 50 Percent Position” Set the analog set point signal on the AUX I/O connector pin 9
to 5.00 Volts and pin 10 to 0.00 Volts
“Move Gate to 100 Percent Position” Set the analog set point signal on the AUX I/O connector pin 9
to 10.00 Volts and pin 10 to 0.00 Volts
“Learn Valve” Connect pin 7 to LOW
“Close Valve” Connect pin 4 to LOW
“Select Pressure Control Mode” Select position control mode by setting the logic level on the
AUX I/O connector pin 5 HIGH
Replacing the Battery
The T3P comes equipped with a battery. This battery is used to close the valve in the event of power loss. The
battery is trickle charged when the T3P is powered. Use the following procedure to change the battery (MKS
p/n 137182-P1).
1. Ensure that the vacuum system is in a state where the power can be removed from the T3P.
2. Remove power.
3. Locate the fan cover plate on the electronics enclosure of the T3P.
4. Remove the 4 Phillips head screws holding this cover in place. See Figure 22.