MKS T3PIA, Instruction Manual, Page: 10 / 70

Valve Safety Information
2
Warning Moving parts in the valve create a risk of personal injury until the valve is securely
incorporated into a system. To avoid injury, keep all body parts away from any
valve opening.
1. Do not insert objects into openings where contact with moving parts is
possible.
2. Isolate the valve from any electrical or pneumatic power supply before
handling the valve.
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE
Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS
Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Qualified service personnel
must perform any service only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the valve when necessary, and
ensure that the material used is compatible with the wetted materials in this product, including any sealing materials.
PURGE THE VALVE
After installing the unit, or before removing it from a system, purge the unit completely with a clean, dry gas to eliminate
all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This valve must be purged under a ventilation hood and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All valve fittings must be consistent with valve specifications and compatible with the intended use of the valve.
Assemble and tighten fittings according to manufacturer’s directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate the valve at pressures higher than the rated maximum pressure (refer to the product specifications for the
maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system
explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and
metal chips may permanently damage the unit or contaminate the process.
KEEP AWAY FROM VALVE OPENING
Keep fingers, other body parts, and other materials away from the valve opening when the valve is in operation.