MKS T3PIA, Instruction Manual, Page: 48 / 70

Chapter Five: Maintenance and Troubleshooting Preventive Maintenance
40
Cleaning and Seal Replacement
1. Clean the valve parts and replace seals on the seal ring as required.
2. Install the seal ring face o-ring without grease.
3. Lubricate the radial groove of the seal ring. Pay attention that the following quantity of grease is
distributed constant on the whole circumference. Refer to Figure 20.
Figure 20: Lubricating O-Ring Groove
Table 20: Seal Ring Quantity of Grease
Nominal Size Quantity of Grease
mm inch ml
320 12 0.5
250 10 0.4
200 8 0.3
160 6 0.25
100 4 0.2
4. Lubricate the o-ring with the following quantity of grease.
Table 21: O-Ring Quantity of Grease
Nominal Size Quantity of Grease
mm inch ml
320 12 0.3
250 10 0.25
200 8 0.2
160 6 0.15
100 4 0.1
5. Install the o-ring.