MKS T3PIA, Instruction Manual, Page: 23 / 70

Setup Chapter Two: Installation
15
Table 6: Maximum Torque Levels When Mounting With the Centering Ring and Spacer Ring
Nominal Size
Max. Tightening Torque
(Nm)
Max. Tightening Torque
(lbf-ft)
mm inch ISO-F JIS ISO-F JIS
320
250
200
160
100
12
10
8
6
4
N/A
17-20
13-15
13-15
8-10
17-20
17-20
13-15
N/A
N/A
N/A
13-15
9-11
9-11
6-8
13-15
13-15
9-11
N/A
N/A
Verify that the depth of the mounting screws is maximum 1X thread diameter.
Standard Spacer
Ring Required
„
Mounting with the O-Ring in Groove
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque
levels in the following table. Higher tightening torques deform the valve body and can lead to an
improper function of the valve.
Table 7: Maximum Torque Levels When Mounting with the O-Ring in Groove
Nominal Size
Max. Tightening
Torque (Nm)
Max. Tightening
Torque (lbf-ft)
mm inch ISO-F JIS ISO-F JIS
320
250
200
160
100
12
10
8
6
4
N/A
35-40
35-40
35-40
20-23
65-70
65-70
35-40
N/A
N/A
N/A
26-30
26-30
26-30
15-17
48-52
48-52
26-30
N/A
N/A
Verify that the depth of the mounting screws is maximum 1X thread diameter.
Admissible Forces
Forces from evacuating the system, from the weight of other components, and from baking can lead to
deformation and malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows
sections.
Table 8: Admissible Forces
Nominal Size
Axial tensile or
compression force (FA) Bending moment (M)
mm inch N lbf Nm lbf-ft
320
250
200
160
100
12
10
8
6
4
3000
2500
2000
2000
1000
660
550
440
440
220
120
100
80
80
40
90
75
60
60
30
F
A
M
For a combination of both forces (FA and M) the values are invalid.
Verify that the depth of the mounting screws is maximum 1X thread diameter.