MKS T3PIA, Instruction Manual, Page: 22 / 70

Chapter Two: Installation Setup
14
Setup
Mounting Instructions
The T3P unit can be mounted in a vacuum exhaust line with the proper fittings and connectors. For best
pressure control, locate the pressure transducer and the T3P as close as practical to the process chamber. This
minimizes the time constants associated with these items.
Caution
Use tubing that is less than 6 inches long and no less that ¼ inch in diameter to connect
the transducer and chamber. If the distance must exceed 6 inches, use a larger
diameter tubing to compensate for conductance loss.
A typical system configuration is shown in Figure 3:
Figure 3: Typical System Configuration
Installation into the Vacuum System
Tightening Torque for Mounting Screws on Flanges
„
Mounting with the Centering Ring and Spacer Ring
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque
levels in the following table. Higher tightening torques deform the valve body and can lead to an
improper function of the valve.
Note
A standard spacer ring is required.
T3P Unit
1/8” NPT
Intermediate
Pumping Port
Chamber Side
Pump Side
Analog Baratron®
Transducer
Process Info:
Diagnostics
Analog Pressure
+/- 15 VDC
¼” Tube
Air/N2
24 VDC Power for Valve
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Configuration
Op/- 15 VDC
Power for Transducer(s)
Host Serial
Port
Master
Controller
Pressure
Position
Trip Points
Set Point