MKS T3PIA, Instruction Manual, Page: 24 / 70

Chapter Two: Installation Setup
16
Mounting Screw Length
Note
The maximum screw penetration into the valve mounting flange is equal to the nominal screw
diameter. The use of screws exceeding this depth may result in improper flange preload and/or
damage to the valve.
Table 9: Mounting Screw Length
Nominal Size Screw Quantity X Diameter
mm inch ISO-F JIS
320
250
200
160
100
12
10
8
6
4
NA
12 X M10
12 X M10
8 X M10
8 X M8
12 X M12
12 X M12
8 X M12
8 X M10
NA
Installation Procedure
1. Install the control valve on the vacuum chamber. Chamber mounting side is indicated on the outline
drawing and is the side opposite the motor.
2. Connect compressed air: Connections are for 1/4” tube
Use only clean, dry air or N2
Compressed air pressure (refer to Table 10 below)
Connect compressed air to controller connection “AIR/N2 INPUT”
3. Connect the heating device (see Heater Specifications in Appendix A: Product Specifications ).
4. Option: Connect vacuum line to intermediate pumping port (1/8” NPT) rotary shaft seals.
Table 10: Required Air Pressure Based on Valve Size
Valve Size Compressed Air Pressure
mm inch psig
320
250
200
160
100
12
10
8
6
4
75-100
65-100
55-100
55-100
55-100