MKS Granville-Phillips 358 series, Instruction Manual

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Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
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Chapter 6 Operation
The instructions in this chapter assume the instructions for Setup,
Installation, and Preparing for Operation have been completed. See
Chapter 2 , Chapter 3 , and Chapter 4 .
For theories of operation for the Micro-Ion Gauge, Convectron Gauge,
electrometer, capacitance manometer, and process control modules,
see
Chapter 7 .
6.1 Controller Operation
Turning the Controller ON
1. Press the top half of the power ON switch on the rear panel of the
Controller (see Figure 6-1).
Figure 6-1 Power ON Switch
2. When the power switch is ON, the Micro-Ion Gauge pressure is
displayed on line Micro-Ion Gauge and Convectron Gauge pressures
are displayed on lines A and B of the display on the front panel of the
Controller (see Figure 6-2). Display formats for the Convectron Gauge
pressures are given in Table 6-1.