MKS Granville-Phillips 358 series, Instruction Manual

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System Components
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
21
Sy
stem C
o
mponents
Ini
tial
Setup
Installation
Before You
Begin
Controller Options
Process Control
Relay Configuration
Contact Rating
Channels
Hysteresis
Setpoint adjustment SPDT, Form C
5A @ 120 VAC, 4A @ 240 VAC resistive or 5A @ 30 Vdc
6 maximum, 2 per operating gauge maximum
10%
Digital, 2 significant digits plus exponent
Digital Interfaces RS-232 or RS-485/422
Dual Convectron Gauge
Pressure Range
Display Units
Maximum Cable Length
Analog Output
Display Resolution 999 to 1 x 10
–4
Torr for N
2
or air
Torr, mbar, pascal (user selectable)
150 m (500 ft)
0 to 7 V, logarithmic, 1 V/decade, adjustable offset of +1 to –7 Vdc
2 significant digits, except for lowest two decades
Micro-Ion Gauge
Sensitivity 3/Torr to 50/ Torr (factory setting is 20/Torr)
Emission Current 20
μ
A, 1 mA, 4 mA
Collector Potential 0 V
Grid Potential +180 Vdc
Filament Potential +30 Vdc
Degas Electron bombardment: 15 mA DC, 250 Vdc, auto shutoff, 2 minutes
Analog Output 0 to 10 Vdc, logarithmic, 1 V/decade
Filaments Dual yttria-coated iridium, or tungsten
†
Operating Temperature 0 °C to +50 °C ambient, noncondensing
Gauge Bakeout Temperature +200 °C maximum
Cable Bakeout Temperature +150 °C maximum
Materials Exposed to Vacuum Vacuum fired, UHV compatible
Internal Volume 10.8 cm
3
(0.66 in.
3
)
Weight 0.1 kg (4 oz.) (with 1 5/16 in. Conflat
®
type flange)
† Tungsten filaments are for applications involving gases containing fluorine, chlorine, or other gas species that poison
yttria-coated iridium filaments. Tungsten filaments are not recommended for general vacuum applications because they may
burnout when exposed to high pressures.
Table 2-3 Specifications