MKS Granville-Phillips 358 series, Instruction Manual

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Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
49
Sy
stem C
o
mponents
Ini
tial
Setup
Installation
Before You
Begin
Chapter 4 Installation
4.1 Gauge Installation Tips
For best results, locate pressure gauges close to the point where pressure
needs to be measured. Gas sources, long tubulation or other constrictions
can cause large errors in indication. Note that if placed near the pump, the
pressure in the gauge may be considerably lower than in the rest of the
system. If placed near a gas inlet or source of contamination, the pressure
in the gauge may be much higher. See Section 4.9 on page -53 for detailed
gauge mounting instructions.
To minimize temperature effects, locate pressure gauges away from internal
and external heat sources in a region where the ambient temperature is
reasonably constant.
Parts of the gauge can get quite hot during degassing, especially if there is
poor ventilation. This will not damage the gauge. However, care should be
taken to prevent low temperature rated materials such as plastic wire
insulation from touching hot parts of the gauge.
4.2 FCC and EU Installation
Requirements
To maintain compliance with FCC Part 15 rules and European Union’s
electromagnetic interference (EMI) directives, install shielded cable with a
braided shield and metal or metallized plastic backshells that connect
directly to the cable shield at the 15-pin I/O connector. Connect the shield
to ground at your equipment. Failure to install the controller as described
above can result in failure of the controller to the requirements for radiated
emissions and susceptibility.
CAUTION
Failure to check system programming before switching
to automatic operation can cause measurement error.
To avoid measurement error due to inaccurate output signals,
carefully check the system programming before switching to
automatic operation.
WARNING
Failure to install appropriate pressure relief devices for
high−pressure applications can cause product damage
or personal injury.
For automatic backfilling and other applications in which
malfunction or normal process conditions can cause high
pressures to occur, install appropriate pressure relief devices.