MKS 1579A Instruction Manual Download

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Y-1951579A

Digital Mass Flow Controller

Type 1579A/B

and

Digital Mass Flow Meter

579A/B

- Instruction Manual -

MASS-FLOW

CONT

ROLL

FLOW

MKS Instruments
Deutschland GmbH

Edition 2010-07

Summary of Contents for 1579A

Page 1: ...Y 1951579A Digital Mass Flow Controller Type 1579A B and Digital Mass Flow Meter 579A B Instruction Manual MASS FLOW CONTROLLER FLOW MKS Instruments Deutschland GmbH Edition 2010 07...

Page 2: ...Federal Republic of Germany Mass Flo is a registered trademark of MKS Instruments Inc Andover MA Swagelok VCR and VCO are registered trademarks of Swagelok Marketing Company Solon OH Cajon VCR and VCO...

Page 3: ...truction Manual 15 Contents 15 Conventions 15 Designations and Names 15 Chapter 2 Shipment 17 General 17 Unpacking 17 Unpacking Checklist 17 Analog Units 17 Profibus Units 18 Label 19 Clean Room Packa...

Page 4: ...Electrical Connections and Cables 33 Cables and Controllers by MKS 33 Power Supply Readout Units of other Manufacturers 34 Non MKS Cables 34 Finishing the Installation 34 Chapter 5 Operation Analog U...

Page 5: ...p 51 Small Diagnostics 53 Full Diagnostics 54 Calibration Table 56 PROFIBUS Setup 57 GSD Files Usage 57 Chapter 7 Theory of Operation 59 Technique of Measurement and Control Electronics 59 Flow Path 5...

Page 6: ...fications 71 Environmental Specifications 72 Electrical Specifications 72 Physical Specifications 73 Appendix B Model Codes 75 Model Code 75 Type Number XXXXA 75 SEMI Gas Code YYY 76 Calibration Gas F...

Page 7: ...View 24 Figure 7 1579A B 579A B Connector Side 24 Figure 8 1579A B 579A B Gas Inlet Side 25 Figure 9 9 pol Connector 26 Figure 10 Profibus Connector 27 Figure 11 1579A B 579A B Dimensions Side 31 Fig...

Page 8: ...Table of Contents 1579A 579A viii This page intentionally left blank...

Page 9: ...the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like...

Page 10: ...AUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used observe the proper safety precautions completely purge the instrument when necessary and ensure that the material used is...

Page 11: ...system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt...

Page 12: ...Safety Information 1579A 579A 12 This page intentionally left blank...

Page 13: ...nd handling of all other signals and commands is operated by the microcomputer in both digital and analog versions of the 1579A B series This provides best accuracy and optimizes the controller s resp...

Page 14: ...uctions Profibus Version The particular features of units with Profibus interface setup and control are described in Chapter 6 Operation Note All Profibus versions can also be operated in analog mode...

Page 15: ...bar with index a relating to absolute pressure whereas index g stands for gage pressure related to atmosphere Example 1 7 bar g 1 7 bar overpressure versus atmosphere gage pressure 0 5 bar a 500 mbar...

Page 16: ...Chapter 1 General Information 1579A 579A 16 This page intentionally left blank...

Page 17: ...ately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover o...

Page 18: ...ZB 27 consisting of Mating connector D type 9 pin female Mating connector D type 9 pin male 2 mounting screws 8 32 UNF MKS part no 160 3973 GSD file 3 5 disc Manual this book Calibration sheet Optiona...

Page 19: ...he housing and the meter controller body there is an extra label to avoid access to the inside by unauthorized people Broken or removed label means lost of any warranty Clean Room Packaging It is poss...

Page 20: ...Chapter 2 Shipment 1579A 579A 20 This page intentionally left blank...

Page 21: ...3 Connectors and Control Elements Analog Units Status LED STS MASS FLOW CONTROLLER FLOW ZERO SETUP RESET AUTOZERO Figure 2 1579A B 579A B Side View Imprint on type 579A B MASS FLOW METER Sub D Stecke...

Page 22: ...g the RESET key the unit performs a self check cycle and a reset The same procedure is done after power on During the cycle the two color LED labeled STS changes its color a few times between red and...

Page 23: ...8 Setpoint Input1 0 to 5 V Setpoint Input1 0 to 5 V Referenced to pin 11 and 12 9 NC NC 10 NC NC 11 Signal Common Signal Common 12 Signal Common Signal Common 13 NC NC 14 NC NC 15 Chassis Ground Chass...

Page 24: ...ents 1579A 579A 24 Profibus Units MASS FLOW CONTROLLER FLOW Status LED STS AUTOZERO RESET ZERO Figure 6 1579A B 579A B Side View Imprint on type 579A B MASS FLOW METER Status LED STS PROFIBUS ANALOG F...

Page 25: ...ring the cycle the two color LED labeled STS changes its color a few times between red and green Finally the LED changes to green indicating that self test cycle and reset have been completed successf...

Page 26: ...served Reserved Figure 9 9 pol Connector For the use of the Profibus version in analog mode is a 15 VDC power supply required For the use in digital mode a 15 VDC or a 24 VDC power supply is sufficien...

Page 27: ...A B 579A B Profibus Units Connector PROFIBUS 9 pol Sub D female Pin Signal Note 1 NC 2 NC 3 RXD TXD P Bus positive 4 CNTR P Control for Repeater positive 5 DGND Digital Ground 6 VP Power Supply 5V 7 N...

Page 28: ...Chapter 3 Connectors and Control Elements 1579A 579A 28 This page intentionally left blank...

Page 29: ...bar g 2 8 3 4 bar g The standard orifice is sized for control over this range with the outlet atmospheric pressure 3 Two kinds of power supply are possible applies to all units 15 V 5 or 24 V 20 5 to...

Page 30: ...ling mount attitude should be avoided 4 Allow adequate clearance for the tubing Take into account when designing the plumbing that a unit may be removed later e g for service or maintenance To de inst...

Page 31: ...ion 1 inch 25 4 mm MASS FLOW CONTROLLER FLOW L 113 150 155 Figure 11 1579A B 579A B Dimensions Side Shown analog unit Imprint on type 579A B MASS FLOW METER Fittings compatible L in mm 8 VCR 183 0 1 4...

Page 32: ...tion 1579A 579A 32 ZERO SETUP RESET AUTOZERO 40 Figure 12 Dimensions Inlet Outlet side Mounting Holes 25 4 12 8 21 85 M3 8 32 UNC 10 24 UNC 38 78 5 56 38 1 Figure 13 Mounting Holes Flow direction from...

Page 33: ...applications Braided shielded cables must be used The PROFIBUS cable must be qualified Cables and Controllers by MKS For use of the analog versions of the types 579A B and 1579A B with controllers pow...

Page 34: ...e 3 With very few exceptions the connector s must make good contact typical 0 01 or less to the device s case ground The case also must be properly grounded 4 When selecting the cable consider a The v...

Page 35: ...forms automatically a reset indicated by the red green blinking status LED STS Finally the LED changes to green light which indicates that the unit is ready for use You can monitor the flow output sig...

Page 36: ...n the potentiometer ZERO at the mass flow unit must be used Note Zeroing should be done only on units that are installed in final position It is recommended to completely stop the gas flow prior to an...

Page 37: ...nect pin 3 to pin 5 analog ground Priority of Commands The 1579 flow controller executes commands based on a hierarchical command structure The highest priority command is Valve Open followed by Valve...

Page 38: ...Chapter 5 Operation Analog Units 1579A 579A 38 This page intentionally left blank...

Page 39: ...libration Tables 15 points each 4 Limit Alarms Run Hours Counter Remaining Time to Calibration Observation Calibration Cycle Count Down Temperature Measurement Valve Drive Level Status LED Signal Filt...

Page 40: ..._FLOW_RATE is smaller than 5 of full scale the flag AUTOZERO 0 to 1 transition will take the actual sensor signal as zero and will subtract this value from all future measurements refer also to USER_Z...

Page 41: ...ling time of the filter FILTER_SETTLING E g if a step input magnitude 100 is applied to the filter with a settling time of 100 second the response out of the filter will be within 2 of the final value...

Page 42: ...a reset indicated by the red green blinking status LED Finally the LED changes to green light which indicates that the electronic circuitry is ready for use 3 You can monitor the flow output signal as...

Page 43: ...figuration of the address switches Refer to Zero Modes in this chapter The command for zero setting also sets the analog flow output signal to zero pin 2 on the connector ANALOG Note Zeroing should be...

Page 44: ...nd there to select the device s address In analog mode a mass flow controller needs an analog setpoint signal If you are not familiar with the binary code refer to Appendix D how to convert decimal nu...

Page 45: ...s mode The address switches in analog mode define the analog zeroing mode Example for setting analog mode and zero mode 3 ADDRESS B 0 1 2 3 4 5 6 A Switch position Zero Modes 0 Offset Value is always...

Page 46: ...on set of the device The selection between small and full functionality is made at setup time with the type of configuration data which is loaded down to the device Small Full Parameter selects the in...

Page 47: ...ved WINK_STATUS 1 6 uint 1 0 to 1 transition sets the LED to blink red green for 3 seconds ENABLE_TOTALIZER 1 7 uint 1 0 disabled 1 enabled RESET_TOTALIZER 0 0 uint 1 0 to 1 transition resets totalize...

Page 48: ...uint 1 flow HIGH_LIMIT Hysteresis 0 5 LOW_LIMIT_ALARM 1 1 uint 1 flow LOW_LIMIT Hysteresis 0 5 SYSTEM_ERROR 1 2 uint 1 any severe error condition Reserved 1 3 uint 5 Reserved 0 0 uint 8 THERMAL_MASS_F...

Page 49: ...ERMAL_MASS_FLOW_RATE 110 OVER_TEMPERATURE 1 7 uint 1 INTERNAL_TEMP MAX_TEMP VALVE_DRIVE_ALARM 0 0 uint 1 VALVE_DRIVE_LEVEL MAX_VTP CALIBRATION_ RECOMMENED 0 1 uint 1 TIME_TO_CAL count down expired UNC...

Page 50: ...UP INITIAL_SETUP 2 0 uint 1 THIS ROM BASE_UNIT 2 1 uint 1 Display in base unit OPERATION_MODE 2 2 uint 1 0 ANALOG 1 PROFIBUS Reserved 2 3 uint 5 Reserved 1 0 uint 8 USER_SPAN 3 0 long 5 200 in in 1E 4...

Page 51: ...ECTION will be updated SET_DEFAULT_TABLE 1 0 uint 1 1 DEFAULT_TABLE will be updated SET_HIGH2_TRIP_POINT 1 1 uint 1 1 HIGH2_TRIP_POINT will be updated SET_LOW2_TRIP_POINT 1 2 uint 1 1 LOW2_TRIP_POINT...

Page 52: ...10 120 full scale 1E 4 steps LOW2_TRIP_POINT 28 0 long 10 120 full scale 1E 4 steps FILTER_SETTLING 32 0 long 0 0 1000 0 in sec in 1E 4 steps SOFT_START_RATE 36 0 long 0 0 3600 0 in sec in 1E 4 steps...

Page 53: ...w device e g r w EPROM ALARM_MKS_SPECIFIC 1 2 uint 1 specific to MKS ALARM_TABLE_ERROR 1 3 uint 1 Reports cal Table errors Reserved 1 4 uint 4 Identification PRODUCT_CODE 2 0 uint16 1179 REVISION_CODE...

Page 54: ...DUCT_CODE 2 0 uint16 1179 REVISION_CODE 4 0 uint8 A VERSION_CODE 5 0 uint16 0x0100 FULL_SCALE_RNG 7 0 long full scale range in FLOW_UNIT in 1E 4 steps FLOW_UNIT 11 0 uint8 SCCM SLM INTERNAL_TEMP 12 0...

Page 55: ..._I 125 0 uint8 15 gas code of gas tables 0 no table y x POINT_NUM_OF_ TABLE_I 140 0 uint8 15 Point number of gas tables TABLE_FLAGS 155 0 uint 1 15 0 FACTORY 1 USER 1 means that the user has overwritt...

Page 56: ...he table will be disabled POINT_NUM 0 If a table with a not valid index is loaded no tables will be affected In both case the error flag for the table will be set The calibration tables convert the me...

Page 57: ...which consists of 4 modules one for each data block type digital input analog input digital output analog output See the section of a GSD file with 4 module below Note At the release of this instruct...

Page 58: ...x91 0xD5 0xA1 0xE1 small send receive Ext_Module_Prm_Data_Len 19 Ext_User_Prm_Data_Const 0 0x10 0x00 0x04 0x00 0x0f 0x42 0x40 0x00 0x00 0x00 0x00 0x00 0x0d 0xbb 0xa0 0x00 0x01 0x86 0xa0 Ext_User_Prm_D...

Page 59: ...entering the flow controller the gas stream passes first through the metering section of the instrument for its mass flow to be measured The gas moves on through the control valve for its rate of flow...

Page 60: ...The control valve is a specially designed solenoid driven valve The armature is suspended by springs This design provides frictionless movement and thus precise control Mounted at the front end of the...

Page 61: ...s the gas correction factors for many commonly used pure gases If the gas you are using is not listed in there you must calculate its GCF The equations for calculating gas correction factors are descr...

Page 62: ...ust add up to 1 0 s1 s2 sn Molecular Structure correction factor for gases 1 through n where S equals 1 030 for monatomic gases 1 000 for diatomic gases 0 941 for triatomic gases 0 880 for polyatomic...

Page 63: ...0 0 0 0 2 5 1 2 5 0 0 2 4 8 5 0 3 1 0 6 0 1 6 6 0 7 7 2 5 0 2 5 3 0 0 7 7 7 0 3 1 0 6 1 0 2 2 5 0 2 4 4 0 3 1 7 6 0 2 4 4 1 3 0 2 GCFM Mass Flow Rate at a Different Reference Temperature The equations...

Page 64: ...controller full scale range 500 sccm N2 full scale signal is 5 VDC and a process gas CCl4 A flow rate of 100 sccm CCl4 shall be converted into 1 VDC As the gas correction factor of CCl4 is 0 31 the f...

Page 65: ...factor for the gas to be used MKS states the flow controller ranges based on flow rate of nitrogen the flow rate for other gases may vary The proper valve configuration depends upon the flow range inl...

Page 66: ...ate of nitrogen sccm Ar slm 130 x 1 39 1 00 x 93 5 slm N2 A flow rate of 93 5 slm of argon will produce a flow rate signal equivalent to 130 slm of N2 This falls within the range of a 100 slm flow con...

Page 67: ...justing zero refer to the instructions in Chapter 5 Chapter 6 Operation of Analog Profibus Units How often the zero readout should be checked and corrected depends on the required accuracy and reprodu...

Page 68: ...nts of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of yo...

Page 69: ...with materials wetted corrosion is typically also visible inside the process fittings Readjust the valve return for service Open shutoff valve first then apply again setpoint to the unit Regulate inle...

Page 70: ...Chapter 10 Maintenance 1579A 579A 70 This page intentionally left blank...

Page 71: ...ressure5 6 8 bar g Pressure Coefficient 0 3 of reading bar Repeatability MFC only 0 2 of full scale Resolution measurement 0 1 of full scale Temperature Coefficients Zero Span 0 05 of full scale C 0 1...

Page 72: ...ut Voltage Current Required 20 5 to 30 0 VDC1 300 mA Output Impedance 1 Output Signal Minimum Load 0 to 5 5 V into 10 k Set Point Command Signal not for type 579A B 0 to 5 V 5 from 20 k CE and EMC Gui...

Page 73: ...alve MFC only 1 x 10 9 0 1 of full scale test gas N2 at 1 bar g at inlet and atmosphere at outlet 1 of F S operational pressure at inlet and atmosphere at outlet Materials Wetted Mass Flow Controller...

Page 74: ...Appendix A Product Specifications 1579A 579A 74 This page intentionally left blank...

Page 75: ...n the connector code The model code is identified as follows XXXXAYYYZZZF1CEAA Type Number Calibrated for SEMI Gas Number Calibrated Gas Fittings Valve Type where Full Scale Range of max 300 slm N2 eq...

Page 76: ...ogen 007 Ammonia 029 Air 008 Silane 039 Nitrogen 013 Acetylene 042 Oxygen 015 Sulfur Hexafluoride 110 Chlorine 019 HMDSO 228 Si CH3 4 301 Calibration Gas Flow Rate ZZZ The full scale range of the cali...

Page 77: ...1579A B only 1 No Valve MFM 579A B Only 3 Electrical Communication Connector C The type of connector and communications is designated by a single letter number code Ordering Code Analog 15 Pin D B Di...

Page 78: ...low Meter To order a 579A for 100 slm Silane with 1 2 Swagelok fittings Profibus communications and Viton seals the ordering code will be 579A 039 12L S 3 4 V Note The Profibus versions of the 79B MFC...

Page 79: ...4 3 926 0 42 Chlorine Cl2 0 1144 3 163 0 86 Chlorodifluoromethane Freon 22 CHCIF2 0 1544 3 858 0 46 Chloropentafluoroethane Freon 115 C2CIF5 0 164 6 892 0 24 Chlorotrifluoroethane Freon 13 CCIF3 0 153...

Page 80: ...7 0 50 Freon 113 C2Cl3F3 0 1610 8 360 0 20 Freon 114 C2Cl2F4 0 1600 7 626 0 22 Freon 115 C2ClF5 0 1640 6 892 0 24 Freon 116 C2F6 0 1843 6 157 0 24 Freon C318 C4F8 0 1850 8 397 0 17 Freon 1132A C2H2F2...

Page 81: ...H3 0 2374 1 517 0 76 Propane C3H8 0 3885 1 967 0 36 Propylene C3H6 0 3541 1 877 0 41 Silane SiH4 0 3189 1 433 0 60 Silicon Tetrachloride SiCl4 0 1270 7 580 0 28 Silicon Tetrafluoride SiF4 0 1691 4 643...

Page 82: ...Appendix C Gas Correction Factors 1579A 579A 82 This page intentionally left blank...

Page 83: ...000 18 0010010 1 0000001 19 0010011 2 0000010 20 0010100 3 0000011 21 0010101 4 0000100 22 0010110 5 0000101 23 0010111 6 0000110 24 0011000 7 0000111 25 0011001 8 0001000 26 0011010 9 0001001 27 0011...

Page 84: ...Appendix C Gas Correction Factors 1579A 579A 84 This page intentionally left blank...

Page 85: ...n 10F No 93 Shoei Yuan Street Hsinchu City 300 Taiwan R O C Tel 886 3 575 3040 Fax 886 3 575 3048 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 M nchen Tel 49 89 420008 0 Fax...

Page 86: ...Next page Health and Safety Form Contact MKS at the web or at any MKS location if the form is missing...

Page 87: ...er Part Label final shipping container Copper Part and place a strip of ORANGE TAPE on the container Has equipment been purged No Yes purged with what Has equipment been flushed No Yes flusched with w...

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