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LANGER 

EMV-Technik 

DE-01728 Bannewitz  
[email protected] 
www.langer-emv.de 

FLS 106 IC set / FLS 106 PCB set 

  Connecting the ICR Near-Field Microprobe 

17.2

Important!  Please  note:  The  probe  tip  of  the  ICR  near-field  microprobe  (ICR  probe  for  short)  is 
highly sensitive to mechanical stress. Therefore, remove the ICR probe's protective cap only after 
the installation or shortly before the measurement. Do not touch the probe tip. The probe should 
not be allowed to come into contact with the DUT either! 

 
As a prerequisite, the cables must have been laid according to section 17.1. 
 
The ICR near-field micro probe has to be installed on the rotary ring of the FLS 106 IC scanner's 
rotary unit. Remove the knurled screws from the rotary ring. 
 

 

Figure 77: Knurled screws removed from the rotary ring 

 
We recommend that you first connect the two cables to the ICR probe and then mount the probe 
on the rotary ring. 
 
Connect  the  SMA-SMA  measuring  cable  to  the  "RF out"  connector  of  the  ICR  probe  (Figure 78) 
and then the SSMB-SSMB cable to the SSMB connector of the ICR probe (Figure 79)
 

 

 

Figure 78: Connecting the SMA cable to the ICR probe 

Figure 79: Connecting the SSMB cable to the ICR probe 

Summary of Contents for FLS 106 IC

Page 1: ...eng User manual FLS 106 IC set FLS 106 PCB set IC scanner 4 axis positioning system PCB scanner 3 axis positioning system Translation of the original German user manual into English Copyright Februar...

Page 2: ...e Subassemblies 11 4 2 UH DUT 11 4 2 1 Claw 01 and Claw 02 11 4 2 2 GND 25 Holder 12 4 2 3 GND 25 Ground Plane 13 4 2 4 SH 01 Probe Holder 13 4 2 5 SUH 106 Safety Enclosure 14 4 2 6 External NA5 EMERG...

Page 3: ...on the Z Axis Tower 27 9 2 1 Connectors on the Control Panel 28 9 2 2 Power Supply Socket 28 9 2 3 Connector for External Emergency Stop Switch or Safety Enclosure 29 9 2 4 Overview of Attachments 30...

Page 4: ...allation 48 15 Installing the scanner driver 48 15 1 Installing the ChipScan Scanner Software 50 15 2 Putting the FLS 106 Scanner into Service with the ChipScan Scanner Software 51 15 3 Fastening the...

Page 5: ...asurement 73 19 4 After Completing the Measurement 74 20 Dismantling after Completing the Measurement s 74 21 Removing the ICR Probe 74 21 1 Removing the Near Field Probe 74 21 2 Removing the SH 01 Pr...

Page 6: ...of the Low Voltage Directive 2014 35 EU The following applicable standards were used to implement the requirements specified by the aforementioned directives DIN EN ISO 12100 2011 Safety of Machinery...

Page 7: ...n assume no liability for damage to property and personal injury if The information given in this user manual has not been observed The FLS 106 scanner was operated by staff not qualified in the field...

Page 8: ...langer emv de FLS 106 IC set FLS 106 PCB set Description of Symbols 2 8 Mandatory signs Warning signs Disconnect the mains plug General warning sign Wash your hands Warning against dangerous electrica...

Page 9: ...Rotary unit Rotary unit 1 8 EMERGENCY STOP switch external NA 5 1 9 User manual FLS 106 m 1 The scope of delivery may deviate depending on the respective order FLS 106 PCB Scope of Delivery 3 2 Item...

Page 10: ...er Supply voltage 100 250 V 50 60 Hz Current consumption 4 5 A Interface USB 2 0 type B Hi speed Weight 75 kg Dimensions L x W x H 1030 x 775 x 900 mm Table 2 General technical parameters of the FLS 1...

Page 11: ...mv de www langer emv de FLS 106 IC set FLS 106 PCB set Technical Parameters of the Subassemblies 4 2 UH DUT 4 2 1 Figure 2 Dimensions of the DUT UH universal holder Claw 01 and Claw 02 4 2 2 Figure 3...

Page 12: ...chnik DE 01728 Bannewitz mail langer emv de www langer emv de FLS 106 IC set FLS 106 PCB set Figure 4 Claws from above with the long hole and M3 screw GND 25 Holder 4 2 3 Figure 5 GND 25 holder with a...

Page 13: ...5 ground plane Diameter 218 mm Depth of the recess 1 7 mm Recess dimensions L x W 103 x 103 mm Weight 2 kg Height 24 mm Table 4 Technical parameters of the GND 25 ground plane SH 01 Probe Holder 4 2 5...

Page 14: ...4 2 6 Length 1260 mm Width 890 mm Height 1000 mm Connection 25 pin D Sub Weight 50 kg Table 6 Technical parameters of the SUH 106 safety enclosure External NA5 EMERGENCY STOP Switch 4 2 7 Figure 8 Ex...

Page 15: ...system Windows 7 64 bit latest service packs Monitor resolution 1280 x 1024 px Hard disk storage 1 GB minimum 10 GB recommended Table 8 System requirements for the ChipScan Scanner software Processor...

Page 16: ...amera at any time The FLS 106 is controlled with the ChipScan Scanner software via a PC The system is used for applications such as Surface scans in compliance with standard DIN IEC TS 61967 3 Volume...

Page 17: ...mage to property and personal injury Also observe the operating and safety instructions for all other devices used in the measurement set up Carry out a visual check before performing a measurement wi...

Page 18: ...nner may only be operated within a protective enclosure section 6 1 1 and 14 1 1 or with a spatial separation section 6 1 2 and 14 1 2 As a result attachments probes and DUTs can only be installed and...

Page 19: ...sure 6 1 1 The FLS 106 scanner is operated inside the SUH 106 protective enclosure Operation with a Spatial Separation 6 1 2 The user provides a spatial separation at an appropriate distance to preven...

Page 20: ...eral oils to escape into the environment These lubricants must be disposed of in compliance with the local official regulations through corresponding collection points Nameplate 8 The nameplate is on...

Page 21: ...106 PCB set Overview of the FLS 106 Scanner 9 Figure 9 Overview Description of the Subassemblies 9 1 Guide Rails along the X Axis 9 1 1 Figure 10 Guide rails of the X axis The electrically driven step...

Page 22: ...ically driven stepping motor moves the gantry on the guide rails along the Y axis over a working range of 600 mm Z Axis Tower 9 1 3 Figure 12 Z axis tower with rotary unit A rotary unit is located at...

Page 23: ...y 9 1 4 Figure 13 Gantry on the FLS 106 The gantry transports the probe that is attached to the rotary unit and the digital DM CAM microscope camera along the Y axis Rotary Unit 9 1 5 Figure 14 Rotary...

Page 24: ...ary unit Either an ICR probe or the SH 01 probe holder can be mounted on the rotary unit s rotary ring The SMA measuring cables can be connected to the SMA coupling Figure 15 The SSMB SSMB cable is co...

Page 25: ...openings for the T nuts The T slot table 600 mm x 540 mm x 19 mm has several hollow sections T nuts Figure 17 can be inserted into the individual hollow sections T slots to fasten the clamping pieces...

Page 26: ...the FLS 106 scanner The EMERGENCY STOP device Emergency Stop that is integrated in the control panel is used to stop the FLS 106 scanner immediately The control LEDs show whether the scanner is switch...

Page 27: ...on the Z Axis Tower 9 2 1 Figure 21 Connectors on the Z axis tower HR10 connectors 12 pin connector marked Camera to connect the digital DM CAM microscope camera 10 pin connector marked rot Axis to c...

Page 28: ...l panel RF out and USB USB connector type B marked USB to connect to a PC via a corresponding USB cable SMA connector marked RF out to connect a measuring device such as a spectrum analyzer or oscillo...

Page 29: ...set FLS 106 PCB set Connector for External Emergency Stop Switch or Safety Enclosure 9 2 4 Figure 24 ext Stop connector The connector marked ext Stop is located on the rear of the FLS 106 scanner and...

Page 30: ...ital DM CAM microscope camera It is attached to the aluminium mounting bracket Figure 25 KA 220 camera arm DM CAM Holder 3 10 2 The DM CAM holder 3 of the FLS 106 IC scanner is used to position and mo...

Page 31: ...era screw shown separately and as connected to the DM CAM holder 3 The camera can be fixed by sliding it into the opening of the camera screw and tightening the small silver coloured knurled screw The...

Page 32: ...ping pieces angle and height can be adjusted with the two grub screws hexagon socket 6 mm Figure 29 Clamping piece with grub screws Hexagon socket screw for clamping piece UH DUT with Claw 01 and Claw...

Page 33: ...holder has an anti rotation element to prevent the GND 25 from turning or slipping Figure 31 GND 25 holder on the T slot plate GND 25 Ground Plane 10 7 The GND 25 ground plane is installed on the GND...

Page 34: ...ectly above the magnetic holder s pin In addition the SH 01 has a collision protection function The probe moves up with the magnetic holder if the probe touches an obstacle when moving down The scanne...

Page 35: ...place Only store the box in closed rooms Store the box on a safe level surface Store the box on the correct side do not tilt Do not stack the box on another box and do not stack anything on top of th...

Page 36: ...ordoning off the area into account if you intend to operate the system with a spatial separation The scanner should be installed on a raised surface such as a table workbench etc Check the worktop s s...

Page 37: ...socket 4 0 mm clockwise to raise the scanner Turn the height adjustment screw counter clockwise to lower the scanner Tighten the clamping screw after adjusting the correct height Give the scanner eno...

Page 38: ...ils with a paper towel Use dry towels made of cloth or fabric to remove the grease Dispose of the towels under due consideration of the local official regulations Prevent the grease from coming into c...

Page 39: ...Y STOP switch locked in place If the EMERGENCY STOP switch is locked the scanner cannot be put into service Therefore the user should check whether the EMERGENCY STOP switch is locked before switching...

Page 40: ...A 5 EMERGENCY STOP switch section 14 1 2 or set up and connect the SUH 106 safety enclosure section 14 1 1 e Check the EMERGENCY STOP switch and release if necessary section 12 5 f Connect the measuri...

Page 41: ...when working on the scanner whilst this is in operation A spatial separation protects the user and can prevent any work on the scanner whilst this is in operation The spatial separation must meet the...

Page 42: ...42 79 LANGER EMV Technik DE 01728 Bannewitz mail langer emv de www langer emv de FLS 106 IC set FLS 106 PCB set Figure 38 D Sub port ext Stop Figure 39 NA 5 EMERGENCY STOP switch with D Sub connector...

Page 43: ...axis tower Figure 40 Cable of the rotary unit on the rot Axis connector Installing the Digital DM CAM Microscope Camera on the 14 3 FLS 106 IC Installing the DM CAM Holder 3 for the Microscope Camera...

Page 44: ...3 Insert the digital microscope camera into the opening of the camera screw and fix it in the desired place with the small silver coloured knurled screw The microscope camera can be installed before...

Page 45: ...to the opening of the camera screw located on the camera arm and fix with the small silver coloured knurled screw Figure 47 Digital DM CAM microscope camera installed on the KA 220 camera arm Figure 4...

Page 46: ...easuring Device for Near Field Scans by Taking a 14 7 Spectrum Analyzer as an Example To connect a spectrum analyzer to the FLS 106 scanner one end of the corresponding measuring cable is connected to...

Page 47: ...06 IC set FLS 106 PCB set Switching the FLS 106 Scanner on 14 8 Bring the toggle switch on the rear of the scanner into the I position to switch the FLS 106 scanner on properly After switching the FLS...

Page 48: ...matically when the FLS 106 scanner is connected to the respective PC The driver does not have to be installed by hand Process a Connect the scanner to the PC via a USB type A B cable section 14 6 b Sw...

Page 49: ...6 PCB set Figure 54 Updating the driver 4 Select the Browse my computer for driver software option in the dialogue window that opens Figure 55 Selection for driver search 5 Click the Browse button tha...

Page 50: ...tion folder on the installation CD or USB memory stick The installation file is on the installation CD in the ChipScan Scanner folder 1 To start the installation process insert the installation CD int...

Page 51: ...Scanner software 2 Connect the ChipScan Scanner software to the FLS 106 scanner Click the Device Manager entry in the Devices menu in the ChipScan Scanner software Click the Detect Devices button Sear...

Page 52: ...r is switched on and each time the scanner is stopped The scanner can then be moved into the desired position with the arrow keys of the directional pad 4 Open Video View Click the Video entry in the...

Page 53: ...e grub screws M8 hexagon socket 4 mm Note Scratches and or other traces may be left on the T slot table if the clamping pieces are fastened too tight fasten the screw only hand tight Process Insert th...

Page 54: ...device under test is held firmly enough so that it cannot slip away Fastening a Circuit Board with the UH DUT Universal Holder 16 2 As a prerequisite the UH DUT has already been installed on the T slo...

Page 55: ...alling the UH DUT 16 2 1 Note Scratches and or other traces may be left on the T slot table if the clamping pieces are fastened too tight Take due care Place the UH DUT universal holder on the T slot...

Page 56: ...the GND 25 Ground Plane 16 3 1 As a prerequisite the GND 25 holder has already been installed on the T slot table section 16 3 3 Place the GND 25 ground plane Figure 66 on the GND 25 holder so that th...

Page 57: ...either be developed by customers themselves using the IC test instructions 2 from Langer EMV Technik GmbH or by Langer EMV Technik GmbH on the basis of the customer s specifications Installing the GND...

Page 58: ...IC set FLS 106 PCB set Figure 68 Fastening the GND 25 holder The anti rotation element can be fastened in one of the four outer holes as required It ensures that the installed GND 25 ground plane doe...

Page 59: ...of the cable holder on one side see Figure 70 Figure 70 Unscrewing the cable holder Screw the short SMA SMA RA measuring cable to the SMA coupling Figure 71 and then lay it on the rotary ring as shown...

Page 60: ...MA RA measuring cable to the SMA coupling Figure 75 Figure 75 Connecting the SMA SMA RA measuring cable to the SMA coupling Figure 76 Cable holder on the rotary ring Place the SMA SMA cable and SSMB S...

Page 61: ...the DUT either As a prerequisite the cables must have been laid according to section 17 1 The ICR near field micro probe has to be installed on the rotary ring of the FLS 106 IC scanner s rotary unit...

Page 62: ...rews M3 Figure 80 Figure 80 ICR probe mounted with the knurled screws The protective cap of the ICR probe should be removed only before the measurement Press the yellow button on the front to release...

Page 63: ...SMA RA measuring cable that is connected to the SMA coupling to the SMA input of the BT 706 Figure 85 Figure 85 Connecting the SMA SMA cable Figure 86 Connecting the power supply cable Connect the bi...

Page 64: ...Test checkbox This is only possible if the SSMB SSMB depth test cable is connected to the SSMB connector of the ICR probe and the SSMB connector on the rotary unit Figure 73 Figure 80 and the ICR prob...

Page 65: ...y unit and lay the cable on the rotary unit s rotary ring as shown in Figure 87 Figure 87 SSMB SSMB cable connected to the rotary unit s connecting plug for collision control Figure 88 SSMB SSMB cable...

Page 66: ...n 10 8 Thanks to the rear bore the probe sleeve can be returned to the magnetic holder of the SH 01 and fastened in the correct position Finally check that the installed near field probe moves smoothl...

Page 67: ...d the RF in connector on the Z axis tower Figure 97 Figure 94 Connecting the RF measuring cable to the near field probe Figure 95 Connecting the RF measuring cable to the SMA coupling Figure 96 SMA SM...

Page 68: ...input Figure 100 Connect the pre amplifier s power supply cable to the 12 V DC connector of the Z axis tower Figure 101 Figure 100 RF measuring cable connected to the pre amplifier Figure 101 Pre ampl...

Page 69: ...necting the HR10 plug to the connector on the Z axis tower Then insert the near field probe into the probe sleeve of the probe holder and carefully tighten the screw on the outside of the probe sleeve...

Page 70: ...he near field probe and the RF in connector on the Z axis tower Connecting a near field probe with a pre amplifier 18 2 2 Note The selection of the correct pre amplifier depends on the measurement tas...

Page 71: ...he collision control has to be activated in the ChipScan Scanner software by ticking the Depth Test checkbox The probe moves up with the magnetic holder if the probe touches an obstacle when moving do...

Page 72: ...esired location The slanted surface of the prism acts as a mirror that allows you to observe the vertical distance between the probe tip and DUT surface with the DM CAM The DM CAM has to be adjusted s...

Page 73: ...lution bandwidth is small it may take several seconds In addition the sweep time is multiplied by the value set at Average Count if Average is used Transmission Time 19 3 4 The time for the transmissi...

Page 74: ...B SSMB depth test cable from the ICR probe s SSMB connector with your free hand and unscrew the SMA SMA measuring cable from the ICR probe s SMA connector You can now put the ICR probe in its correspo...

Page 75: ...n the GND 25 holder with both hands and raise it Removing the GND 25 Holder 21 9 Unscrew the two screws M6 hexagon socket 4 mm to remove the GND 25 holder Then raise the GND 25 holder and remove the T...

Page 76: ...ner and its attachments Before each use Clean the scanner surface with a dust cloth Monthly or more often if necessary Clean dirty locations particularly the sliding rails with a moist cloth and neutr...

Page 77: ...es points and corners if the system is not properly dismantled and disposed of The tools used for dismantling and disposing of the system may also cause injuries We thus recommend Langer EMV Technik G...

Page 78: ...mer Service 24 Please contact us if you have any queries hints and suggestions You can reach us Monday Friday 8 00 am to 3 00 pm Contact us at Langer EMV Technik GmbH Rosentitzer Stra e 73 01728 Banne...

Page 79: ...ed The warranty will be forfeited if an unauthorized repair is performed on the product the product is modified the product is not used for its intended purpose the product is opened This document may...

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