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8. Troubleshooting
If the equipment does not operate correctly, go through the following procedure as much as
possible before contacting HORIBA STEC,CO.,LTD. services so that HORIBA STEC,CO.,LTD.
is able to provide you with quick service.
8.1. The equipment is not turned on
Power is not turned on.
Check the power source.
Abnormal
Normal
Power supply
Abnormal
Check AC adapter
and connectors.
Plug in again
Normal
※
Check, repeair
or replace wiring,
or circuit board.
Items marked with “
※
” are services from HORIBA STEC,CO.,LTD. or your dealer.
Placing order for the services is recommended.
Summary of Contents for SF-1U
Page 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...
Page 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...
Page 3: ...J i...
Page 4: ...J ii...
Page 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...
Page 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...
Page 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...
Page 10: ...J 4 5 2...
Page 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...
Page 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...
Page 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...
Page 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...
Page 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...
Page 19: ...J 13 8 8 1...
Page 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...
Page 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...
Page 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...
Page 23: ...J 17 8 6 8 7 7 1 3...
Page 39: ...E 4 5 Description of each part Fig 2 Description of each part...