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Safety instructions
Be sure to read this “Safety instructions” section before using this equipment.
Read and understand these messages thoroughly before operating the equipment.
WARNING
Failure to abide by the information in a
WARNING
may result in serious injury and can
be life threatening.
CAUTION
Failure to abide by the information in a
CAUTION
may result in moderate injury and/or
property or product damage.
Examples of symbols
CAUTION (including WARNING
)
Operations that must not be performed.
Operations that always must be performed.
NOTE
:
Important information to prevent faults or damage to the equipment.
REF.
:
Reference to improve measurement accuracy.
WARNING
DO NOT LET REACTIVE GAS FLOW.
Do not let reactive gas that react with water or oxygen. This equipment
doesn’t have a perfect gas sealing. Besides, it uses liquid for filming. Letting
reactive gas flow may cause damage or injury through fire or explosion.
LEAD GAS TO SAFE PLACE.
Make an exhaust line to a safe place. Otherwise an explosion or other
hazards may happen.
USE DEDICATED AC ADAPTER.
Using an inappropriate AC adapter may cause damage or injury through fire
or electric shock.
DO NOT DISASSEMBLE OR MODIFY EQUIPMENTS.
Removing covers may cause damage or injury through fire or electric shock.
DO NOT RUN WATER OVER.
Running water over may cause damage or injury through fire or electric
shock.
Summary of Contents for SF-1U
Page 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...
Page 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...
Page 3: ...J i...
Page 4: ...J ii...
Page 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...
Page 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...
Page 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...
Page 10: ...J 4 5 2...
Page 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...
Page 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...
Page 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...
Page 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...
Page 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...
Page 19: ...J 13 8 8 1...
Page 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...
Page 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...
Page 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...
Page 23: ...J 17 8 6 8 7 7 1 3...
Page 39: ...E 4 5 Description of each part Fig 2 Description of each part...