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CAUTION
DO NOT SHORT CIRCUIT CONNECTER TERMINALS.
Short circuit may cause damage or injury through fire.
AVOID IMPACT
This equipment has a glass tube inside. Having impact may cause damage
or injury through glass broken.
BE SURE TO FIX MEASURING UNIT.
Make sure that the measuring unit is fixed to the main body by turning the
fixing lever when you install. Carrying or using them without fixing may cause
damage or injury through dropping or turning over
UNPLUG WHEN NOT IN USE FOR A LONG TERM.
Leaving plug when not in use may cause damage or injury through fire or
electric shock.
WARNING LABEL AND ITS LOCATION
Summary of Contents for SF-1U
Page 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...
Page 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...
Page 3: ...J i...
Page 4: ...J ii...
Page 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...
Page 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...
Page 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...
Page 10: ...J 4 5 2...
Page 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...
Page 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...
Page 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...
Page 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...
Page 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...
Page 19: ...J 13 8 8 1...
Page 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...
Page 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...
Page 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...
Page 23: ...J 17 8 6 8 7 7 1 3...
Page 39: ...E 4 5 Description of each part Fig 2 Description of each part...