Cell ID & Gas ID
Cell ID
Gas ID
0
N/A
0
N/A
1
H2
1
H2
2
SiH4
2
SiH4
3
Cl2
3
Cl2
4
NH3 Low
4
NH3
5
NH3 High
5
HBr
6
HBr
6
HCl
7
HCl
7
CO
8
CO
8
PH3
9
PH3
9
BCl3
10
BCl3
10 HF
11
HF High
11 TEOS
12
TEOS
12 B2H6
13
B2H6
13 ClF3
14
ClF3
14 BF3
15
BF3
15 WF6
16
WF6
16 O3
17
O3
17 GeH4
18
GeH4
18 CH4
19
CH4
19 AsH3
20
AsH3
20 F2
21
F2
21 SiF4
22
SiF4
22 O2
23
O2
23 Si2H6
24
Si2H6
24 SO2
25
SO2
25 CO2
26
CO2
26 SiH2Cl2
27
SiH2Cl2
27 NO
28
NO
28 N2O
29
N2O
29 NO2
30
NO2
30 Br2
31
Br2
31 H2S
32
H2S High
32 POCl3
33
H2S Low
33 3MS
Midas-M
96
User Manual
Summary of Contents for Midas-M
Page 2: ......
Page 6: ......
Page 9: ...User Interface Detector s User Interface overview Midas M 9 User Manual ...
Page 16: ...Midas M 16 User Manual ...
Page 25: ...Generic example Midas M Isolated 4 20mA output w PoE power Midas M 25 User Manual ...
Page 37: ...Option Operations you can Test from the selected option l Inhibit time Midas M 37 User Manual ...
Page 55: ...3 Wait until the gas reading is stable and then click Accept Midas M 55 User Manual ...
Page 63: ...Midas M 63 User Manual ...
Page 64: ......
Page 68: ......
Page 81: ......
Page 100: ...Midas M 100 User Manual ...
Page 104: ...The certificate should be reinstalled when the IP address is changed Midas M 104 User Manual ...
Page 109: ... 2019 ...