Gas Table
Gas Name
Formula
Range Resolution
Default
Alarm
1
Default
Alarm
2
Sensor
Part
Number
Maximum
Sensor
Warm-up
Time(minutes)
Flow
Rate
(cc/min)
Calibration
Bump Test
Recommended
Maximum
Sample Line
Length(m)
End of line filter
Calibration
Gas
Conc.
Output
Equiv.
(ppm)
Exp
Time
(sec)
Recommended
Bump Test
Gas
Conc
(ppm)
Max
Time
(sec)
Hydrogen
Chloride
HCI
0 - 8
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
E2
20
600
HCl
4
4
300
HCl
4-6
180
5
1
1991-0147
Boron
Trichloride
BCI3
0 - 8
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
E2
20
600
HCl
4
4
300
HCl
4-6
180
5
1
1991-0147
Dichlorosilane SiH2Cl2
0 - 8
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
E2
20
600
HCl
4
4
300
HCl
4-6
180
5
1
1991-0147
Hydrogen
Bromide
HBr
0 - 8
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
E2
20
600
HCl
4
4.5
300
HCl
4-6
180
5
1
1991-0147
Silane
SiH4
0 - 20
ppm
0.01 ppm
2.5
ppm
5 ppm
MMS-
X2
20
600
SiH4
10
10
300
SiH4
10
180
30
"780248, 1991-
0147 or 1830-
0055""780248,
1991-0147 or
1830-0055"
Disilane
Si2H6
0 - 20
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
E2
20
600
SiH4
4
4
300
SiH4
10
180
10
"780248, 1991-
0147 or 1830-
0055"
Hydrogen
(ppm)
H2
0 -
1000
ppm
5 ppm
125
ppm
250
ppm
MMS-
G2
10
600
H2
500
500
300
H2
500
180
30
"780248, 1991-
0147 or 1830-
0055"
Chlorine
Cl2
0 - 2
ppm
0.01 ppm
0.25
ppm
0.5
ppm
MMS-
L2
10
600
Cl2
1
1
300
Cl2
1
180
10
1991-0147 or
1830-0055
Ammonia
NH3
0 -
100
ppm
0.5 ppm
12.5
ppm
25
ppm
MMS-
A2
10
600
NH3
50
50
300
NH3
50
180
10
"780248, 1991-
0147 or 1830-
0055"
Carbon
Monoxide
CO
0 -
100
ppm
0.5 ppm
12.5
ppm
25
ppm
MMS-
C2
10
600
CO
50
50
300
CO
50
180
30
"780248, 1991-
0147 or 1830-
0055"
Phosphine
PH3
0 -
1200
ppb
5 ppb
150
ppb
300
ppb
MMS-
R2
20
600
PH3
600
ppb
600
ppb
300
PH3
600
180
30
"780248, 1991-
0147 or 1830-
0055"
Ozone
O3
0 - 0.4
ppm
0.002
ppm
0.05
ppm
0.1
ppm
MMS-
U2
10
600
O3
0.2
0.2
300
NO2
2
1
180
5
1830-0055
Oxygen
Proficiency &
Deficiency
O2
0 - 25
%vol
0.1 %vol
23.5
%vol
19.5
%vol
MMS-
D2
30
600
O2
Air
20.9
%vol
300
O2
Air
180
30
"780248, 1991-
0147 or 1830-
0055"
Sulfur Dioxide SO2
0 - 8
ppm
0.05 ppm
1 ppm
2 ppm
MMS-
S2
10
600
SO2
4
4
300
SO2
4
180
30
1991-0147 or
1830-0055
Hydrogen
HF
0 - 12
0.05 ppm
1.5
3 pmm MMS-
20
600
HF
6
6
300
Cl2
10
180
5
1
1991-0147 or
Summary of Contents for Midas-M
Page 2: ......
Page 6: ......
Page 9: ...User Interface Detector s User Interface overview Midas M 9 User Manual ...
Page 16: ...Midas M 16 User Manual ...
Page 25: ...Generic example Midas M Isolated 4 20mA output w PoE power Midas M 25 User Manual ...
Page 37: ...Option Operations you can Test from the selected option l Inhibit time Midas M 37 User Manual ...
Page 55: ...3 Wait until the gas reading is stable and then click Accept Midas M 55 User Manual ...
Page 63: ...Midas M 63 User Manual ...
Page 64: ......
Page 68: ......
Page 81: ......
Page 100: ...Midas M 100 User Manual ...
Page 104: ...The certificate should be reinstalled when the IP address is changed Midas M 104 User Manual ...
Page 109: ... 2019 ...