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Appendix A: Technical Specifications
82
Exicor GEN5 User Manual
Measurement Spot size:
1 mm nominal
Maximum scan region:
1100 mm x 1300 mm
General
Software:
Exicor™ GEN (025-0000-066)
Computer System:
PC, Windows
™
operating system, LCD monitor
System footprint area:
200 cm x 200 cm
System height:
170 cm
Service Access footprint:
250 cm x 250 cm (min of 250mm access on
sides and back of system)
Scanning Module Weight:
~ 520 kg
Safety Feature:
Emergency OFF switches
(1)
Repeatability – Definition and Test Conditions:
- Repeatability:
the
3
σ
value from 100 sequential measurements is less than
the specified repeatability value.
-
System tests performed in a laboratory environment (temperature change
<1ºC for one hour prior to and during measurement)
-
Machine is turned on for minimum of 1 hour before test with auto-offset time
interval of 5 minutes
-
Sample is in a fixed position
-
Test sample: Polished with parallel-faces, placed orthogonal to light beam
-
Sample transmissivity > 70% at measurement wavelength
-
Note: Operation is possible with sample transmissivity as low as 10%;
however, repeatability and accuracy are reduced under these conditions.
(2)
Background Noise level – Definition and Test Conditions
-
Definition: the average of 100 sequential measurements with no sample in the
light beam
-
System tests performed in a laboratory environment (temperature change
<1ºC during for one hour prior to and during measurement)
-
Machine turned-on for minimum of 1 hour before test with auto-offset time
interval of 5 minutes
-
System tests performed in a laboratory environment (temperature 20 ± 1C)
Summary of Contents for Exicor Gen5
Page 1: ...USER MANUAL Hinds Instruments Inc P N 010 0000 061 UM Rev B ...
Page 2: ......
Page 3: ...USER MANUAL Hinds Instruments Inc P N 010 0000 061 UM Rev B Software 025 0000 066 Version 1 0 ...
Page 10: ...Table of Tables viii Exicor GEN5 User Manual ...
Page 22: ...Operators Safety Summary 12 Exicor GEN5 User Manual ...
Page 72: ...Chapter 4 Software Interface 62 Exicor GEN5 User Manual ...
Page 90: ...Chapter 7 Troubleshooting Help 80 Exicor GEN5 User Manual ...
Page 94: ...Appendix A Technical Specifications 84 Exicor GEN5 User Manual ...
Page 97: ......