Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 50 / 54

Index
50
Micro-Ion E Module Instruction Manual 354011, Rev. A
sensitivity to N
2
44
specifications 44
Module
attaching to vacuum chamber 13
components 11
location 12
operation 47
status 33
O
Operation
analog 17 , 19
analog versus RS-232 17
error responses 26
Micro-Ion E gauge ON/OFF 20 , 30
Micro-Ion E gauge ON/OFF status 21 , 31
overview 17
reading firmware version 34
reading module status 33
reading vacuum pressure 22 , 32
resetting to default baud rate 30
resetting to programmed values 33
RS-232 18 , 25
RS-232 command set 27
setting baud rate 28
tasks, analog module 19
tasks, RS-232 25
toggling locked functions 28
unlocking interface functions 27
Output functions
analog 19
RS-232 25
Overpressure limit 23 , 33
P
Physical specifications 45
case material 45
materials exposed to vacuum 45
weight 45
Power supply
requirements 45
wiring 13
Preparing to operate the module
analog 19
RS-232 25
Pressure
correction factors 23 , 32
gases other than N
2
or air 23 , 32
N
2
or air 22 , 32
Pressure relief devices 11
R
Radio frequency interference (RFI) 16
Reading and following instructions 8
Response time 43
RS-232 command set 27
RS-232 commands
FAC 18 , 30
IG 18 , 30
IGS 18 , 31
RD 18 , 32
RS 18 , 33
RST 18 , 33
SB 18 , 28
SO 18 , 33
TLU 18 , 28
UNL 18 , 27
VER 18 , 34
RS-232 output specifications 44
S
Specifications
analog output 44
bakeout temperature 43
case material 45
electrical connectors 45
emission current 44
filament 44
I/O wiring connector 45
LED status indicator 44
materials exposed to vacuum 45
Micro-Ion E gauge 44
Micro-Ion E gauge filament bias 44
Micro-Ion E gauge grid bias 44
Micro-Ion E gauge sensitivity 44
operating temperature 43
outputs and indicators 44
physical 45
power requirements 45
pressure measurement 43