Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 19 / 54

Micro-Ion E Module Instruction Manual 354011, Rev. A
19
Be
for
e
Yo
u Beg
in
Installa
tion
O
pe
ra
tio
n
Ove
rview
An
alog
O
p
e
ra
tio
n
M
ain
tena
nce
RS-
232
O
p
e
ra
tion
Chapter 4 Analog Operation
4.1 Output Functions
The module has an analog output. The 0 to 10 Vdc output is in linear
proportion to the logarithm of vacuum pressure, for N
2
or air, as measured
by the Micro-Ion E gauge.
The output represents N
2
or air pressure in the measurement unit (Torr, Pa,
or mbar) that the customer has specified when ordering the module.
If the process gas is a gas other than N
2
or air, you must apply a correction
factor to determine the actual pressure for the gas that is being used.
You may use a switch installed between pins 1 and 2 on the module 9-pin
connector to turn the Micro-Ion E gauge ON or OFF.
4.2 Preparing to Operate the
Module
Before putting the module into operation, you must install the module in
accordance with the instructions on pages 11–16.
If you need application assistance, phone a Brooks Automation /
Granville-Phillips application engineer at
1–303–652–4400 or
1–800–776–6543 within the USA, or email co-csr@brooks.com.
4.3 Operational Tasks
Once the module is operating, you may perform the tasks listed in Table 3-1
on page 17
.
Using the module to measure the pressure of flammable
or explosive gases can cause a fire or explosion resulting
in severe property damage, personal injury, or death.
Do not use the module to measure the pressure of flammable or
explosive gases.