Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 49 / 54

Micro-Ion E Module Instruction Manual 354011, Rev. A
49
Index
A
About these instructions 7
Analog output specifications 44
Appendixes
Specifications 43
Theory of Operation 47
B
Baud rate 28
C
Case material 45
Caution and warning statements 7
Chapters
Analog Operation 19
Before You Begin 7
Installation 11
Maintenance 35
Operation Overview 17
RS-232 Operation 25
Customer service 35
D
Damage requiring service 35
Default baud rate 30
Definitions of terms 8
Dimensions 12 , 45
E
Electrical connectors 45
Emission current specifications 44
Error responses 26 , 38
F
Figures
analog output indicating vacuum pressure 22
data timing and response delays 29
dimensions 12 , 45
LED status indicator 21 , 31
Micro-Ion E gauge ON/OFF switch 20
Micro-Ion E gauge pins 41
Micro-Ion E gauge schematic 47
Micro-Ion E gauge status wiring 21
removing electronics assembly 40
vacuum chamber ground connections 16
wiring terminals
module with analog output 14
module with RS-232 output 15
Filament material 44
Firmware version 34
G
Ground wiring 15
I
I/O wiring connector 45
Installation
assembling and connecting wiring 13
attaching module to vacuum chamber 13
connecting cable 13
eliminating RFI 16
grounding 15
locating module 12
pressure relief devices 11
procedure 11
IP Rating 45
L
LED status indicator 21 , 31 , 44
M
Maintenance
damage requiring service 35
Micro-Ion E gauge continuity test 39
RS-232 error messages 26 , 38
symptoms, causes, solutions 36
troubleshooting 35
troubleshooting precautions 35
Materials exposed to vacuum 45
Micro-Ion E gauge
continuity test 39
emission current 44
filament bias 44
filament material 44
grid bias 44
operation 47
overpressure limit 23 , 33
reading ON/OFF status 21 , 31