Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 13 / 54

Installation
Micro-Ion E Module Instruction Manual 354011, Rev. A
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Step 2
Attach module to vacuum chamber
Attach the module vacuum chamber fitting to its mate on the vacuum
chamber.
The NW16KF flange requires O-rings and centering rings between mating
flanges.
a. Tighten the clamp to compress the mating flanges together.
b. Seal the O-ring.
Step 3
Assemble and connect wiring
Connecting Cable
Cable is user-supplied. Brooks Automation / Granville-Phillips does not
supply cable. Install externally shielded cable.
• Connect the shield at both ends of the cable.
• At the module end of the cable, connect the shield to the outer shell of
the subminiature D connector.
Power Supply
Power supply requirement is 24 Vdc ±15%, 12 W maximum.
Twisting the module to tighten the fitting to the vacuum
chamber can damage the module’s internal connections.
• Do not twist the module to tighten the fitting.
• Use appropriate tools to tighten the fitting.