Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 11 / 54

Micro-Ion E Module Instruction Manual 354011, Rev. A
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Chapter 2 Installation
2.1 Module Components
The Micro-Ion E module houses a a Micro-Ion E gauge (Bayard-Alpert type
ionization gauge).
2.2 Pressure Relief Devices
Before you install the module, you should install appropriate pressure relief
devices in the vacuum system.
Brooks Automation / Granville-Phillips does not supply pressure relief
valves or rupture disks. Suppliers of pressure relief valves and rupture disks
are listed in the
Thomas Register under “Valves, Relief” and “Discs,
Rupture.”
2.3 Installation Procedure
The module installation procedure includes the following steps:
1. Locating the module.
2. Attaching the module vacuum chamber fitting to its mate on the
vacuum chamber.
3. Assembling and connecting module wiring.
This chapter also explains what to do if radio frequency interference (RFI)
disrupts operation of RS–232 version of the module.
Using the module to measure the pressure of flammable
or explosive gases can cause a fire or explosion resulting
in severe property damage or personal injury.
Do not use the module to measure the pressure of flammable or
explosive gases.
Exposing the module to moisture can cause fire or
electrical shock resulting in severe property damage or
personal injury.
To avoid exposing the module to moisture, install the module in
an indoor environment. Do not install the module in any
outdoor environment.