Granville-Phillips Micro-Ion 354 E Series, Instruction Manual, Page: 8 / 54

Chapter 1
8
Micro-Ion E Module Instruction Manual 354011, Rev. A
Caution and warning statements comply with American Institute of
Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.3 Reading and Following
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. Brooks
Automation / Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
• Read instructions – Read all instructions before installing or operating the
product.
• Follow instructions – Follow all installation, operating and maintenance
instructions.
• Retain instructions – Retain the instructions for future reference.
• Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
• Parts and accessories – Install only those replacement parts and
accessories that are recommended by Brooks Automation /
Granville-Phillips. Substitution of parts is hazardous.
1.4 Definitions of Terms
The terms listed in Table 1-1 are used throughout this manual in reference
to the Micro-Ion E vacuum gauge module.
Table 1-1 Terms Describing the Micro-Ion E Module and Components
Term Description
Module The entire Micro-Ion E module, which includes the housing, gauge assembly,
electronics, and vacuum chamber fitting.
Gauge assembly A removable assembly that contains a hot filament Micro-Ion gauge
(Bayard-Alpert type ionization gauge).
Micro-Ion E gauge The Bayard-Alpert type ionization gauge, which indicates pressure by producing
a current that is proportional to gas density.