Edwards STP-iX455, Instruction Manual

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STP-iX455/iXL455 Series Instruction Manual
4-1
In
st
al
la
tio
n
4 Installation of the STP Pump
4.1 Name and Function of Each Part
4.1.1 Name and Function of the Pump
(1) Inlet Port Flange (ICF
1
, VG
*2
, ISO
*3
)
● Connected to the vacuum equipment (at the high vacuum side).
(2) Outlet Port Flange (KF
*4
25)
● Connected to the inlet port side of the backing-pump.
(3) Purge Port (KF
*4
10)
● Port for purge gas introduction, and for vent valve attachment.
This port is only attached on the corrosion resistant pump (type C or other
models) or on pumps designed for use with a vent valve.
● Introduces a purge gas in order to protect the inside of the STP pump when
pumping reactive or corrosive gases.
● The vent valve when installed reduces the stopping time of the STP pump.
● The STP pump is delivered with a blank flange attached to this port.
(4) Control Unit
● Contains the electronics that control the pump.
Refer to Section 4.1.2, "Name and Function of the Control Unit" for details.
1
: ISO3669 or JVIS–003
*2 : JIS–B–2290
*3 : ISO1609
*4 : ISO2861–1 (JIS–B–8365)