Edwards STP-iX455, Instruction Manual

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STP-iX455/iXL455 Series Instruction Manual
13-6
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13.2.2 No Indication of the "FAILURE" LED
Table 13.3 Troubleshooting with No Indication of the "FAILURE" LED
Symptom Probable cause Countermeasures
Referred
Section
The "POWER" LED
does not illuminate
after powering ON the
external power supply
unit.
Incorrect connection of
power cable.
Connect the power cable correctly. 4.4
Abnormal power
voltage. Set the input voltage to 48V DC. 4.4
Power failure. Check whether or not a power failure
has occurred.
11.1
The "ROTATION"
LED does not flash
after performing the
start operation.
Failure of the "Input
Operation Port"
setting.
Set the input operation port
correctly.
7.1
6.5
Rotation INHIBIT
signal input pins (X2
REMOTE (1)–(3)) are
opened.
When not using this function, short
the circuits between (1)–(3), or open
the circuits between (24)–(25) of the
"X2 REMOTE" connector.
7.1
Rotation INHIBIT
signal does not
function correctly.
Rotation INHIBIT
enable signal input
pins are opened.
Short the circuits between (24)–(25)
of the "X2 REMOTE" connector.
7.1
Insufficient ultimate
pressure.
Failure of the
backing-pump.
Check the capacity and starting
state (use a backing-pump having
more capacity that we specified).
4.3.4
15.1
Leakage of the piping
system.
Check the piping system for leakage. 4.3.4
Residual molecules. If the main composition is H
2
or H
2
O,
perform baking; if it is other gases,
clean the inside of the vacuum
equipment (If gases remain inside
the STP pump, contact Service office
when it is needed to be cleaned).
5.1
Abnormal noise is
generated while the
pump is rotating
External vibration or
impact
Remove external vibration so as not to
transmit it to the STP pump. 4.2.1
◇ When external vibration or impact
causes the rotor to come in
contact with the touch down
bearing, contact noise is
generated from the STP pump.
Although the rotational noise of
the touch down bearing may last
approx. 10 to 20 seconds, this is
not an indication of abnormality.