Edwards STP-iX455, Instruction Manual

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STP-iX455/iXL455 Series Instruction Manual
15-1
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15 Specifications and Accessories
15.1 Specifications for the STP Pump
Table 15.1 Specifications for the STP Pump (1/2)
Item
Specifications
STP-iX455 STP-iXL455
Flange size
Inlet port flange
ICF152/
VG100/
ISO100
ICF203/
VG150/
ISO160
ISO100 ISO160
Outlet port flange KF25 KF25 KF25 KF25
Pumping
speed
N
2
L/s 300 450 300 380
H
2
L/s 300 460 300 380
Compression
ratio N
2
>10
8
H
2
1
×
10
4
Ultimate
pressure
Pa (Torr)
Without
anti-corrosive
treatment
ICF 10
-8
(10
-10
)
VG/ISO
6.5
×
10
-6
(5
×
10
-8
)
Corrosion
resistant type ICF 10
-7
(10
-9
)
VG/ISO 6.5
×
10
-6
(5
×
10
-8
)
Maximum working pressure
(Natural air)
Pa (Torr) 1.3
×
10
-1
(1
×
10
-3
)
Allowable backing pressure
(Natural air)
Pa (Torr) 67 (0.5)
Rated speed rpm 55,000
Rated speed variable range rpm 45,000 to 55,000
Starting time min
≦
6
Stopping time min
≦
8
Vibration
μ
m(0–P) < 0.01 (55,000 rpm) < 0.001 (55,000 rpm)
Noise dB < 50 (55,000 rpm)
Leakage
magnetic
flux
Axial
direction
mGauss
≦
100
Radial
direction
mGauss
≦
100
Baking temperature °C < 120
Bearing 5 axis free-controlled magnetic bearing
Lubricating oil Not necessary
Installation position Free
Cooling method Natural air cooling
(Air cooling: At baking and gas pumping)
Backing pump L/min 240
Ambient temperature range °C 0 to 40
Storage temperature range °C –25 to 55
Mass
*1
kg 16
The values shown in the table are typical; they are not guaranteed.
*1 : Except the optional accessory.