Edwards STP-iX455, Instruction Manual

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STP-iX455/iXL455 Series Instruction Manual
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13.4 Maintenance
13.4.1 Recommended overhaul intervals
Regular overhaul (the cost of overhaul will be at your own charge) is required for safety
and proper use of STP pump.
The recommended intervals for different process applications are tabulated below:
Process Intervals Remarks
Etching
*1
Metal etch process
(deposition)
1 year Processes resulting in large amount of deposits
in the pump will require more frequent service
(includes non-etching process).
Other etch process 2 years
Other semiconductor process 2 years
Clean application 5 years No gases used (only vacuum pumping)
Other use 2 years Dependent on application, contact Edwards.
*1
"Etching" includes semiconductor etching and LCD etching.
◇ When STP pump detects warning, it is essential to have the touch down bearings
replaced regardless of the recommended overhaul intervals. Refer to the
Instruction Manual for each model for details of warning detection.
13.4.2 Standard replacement parts
When overhauling pumps, upper and lower touch down bearing, O-rings will be replaced
as standard replacement parts.