Edwards STP-iX455, Instruction Manual

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STP-iX455/iXL455 Series Instruction Manual
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Install the STP pump in a place meeting the following requirements:
Table 4.1 Operating Environment
Ambient Temperature 0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment
● A place free of externally-applied mechanical shock
● A place free of a heat source (Keep clear of the heat source or
attach a thermal shield plate)
● A place free of a strong magnetic field (Range: up to 15 mT
(150 G) in the axial direction, and up to 3 mT (30 G) in the
radial direction with respect to the rotational axis of the
STP pump)
● A place free of a strong electric field
● A place free of a source of electric noise
● A place free of radiation
● No discharge of high voltage (more than 500 V) (If more
than 500 V is discharged, contact Edwards)
● A place free of exposure to direct sunlight
● A place free of high humidity
● A place free of dust
● A place free of salty air
● A place free of dripping water
● A place free of explosive or flammable gas
● A place free of corrosive gas
● A place free of excessive vibration
STP Pump Installation
Equipment Conditions Install the STP pump securely so that foreign materials will not
easily fall into the STP pump (Ex.: Si wafers or samples are
positioned above the STP pump) (To prevent foreign materials
from falling into the STP pump, design a shield plate with large
conductance)