Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
23
Table 4-1: Bench Troubleshooting
Trouble
Possible Cause
Check/Corrective Action
Output stays at zero (regardless of
Clogged Sensor
Clean sensor. Refer (Section 4.3).
Set point) and there is flow through
the meter/controller
Defective electronic board
Flow can not be achieved regardless Clogged Control Valve
Clean the control valve (section 4.3) or
of checkpoint. (applicabable to MFC)
return the device to the factory
Valve override input is grounded
Check the valve override input
(pin 5 of 9 row)
Defective electronic board
Contact Brooks Instrument.
Output signal stays at approx. 5.25
Valve leaks or is stuck open
Clean and/or adjust control valve
Vdc or 21 mA (regardless of Set
(applicable to MFC)
(Section 4.3).
point) and there is flow through the
meter/controller
+15V applied to the valve override
Check the valve override terminal
input (applicable to MFC)
(pin 5 of 9 row)
Defective electronic board
Contact Brooks Instrument.
Output signal follows Set point at
Control valve leaks or is stuck open
Clean the control valve or return the
higher set points but will not go
device to the factory (Section 4.3)
below 2%
Output signal follows Set point at
Insufficient inlet pressure or pressure
Adjust pressures, inspect in-line filters
lower set points, but does not reach
drop
and clean/replace as necessary 4.2
full scale
Partially clogged sensor
Clean sensor, see cleaning procedures
(Section 4.3)
Partially clogged valve
Clean the control valve (section 4.3) or
(applicable to MFC)
return the device to the factory, see
cleaning procedures
Valve out of adjustment
Adjust valve, see calibration procedures
(applicable to MFC)
(Section 4.4)
Valve guide spring failure
Controller oscillates (see below)
(applicable to MFC)
Instrument grossly out of calibration.
Partially clogged sensor
Clean sensor, see cleaning procedures
Flow is higher than desired
(Section 4.3)
Instrument grossly out of calibration.
Partially clogged restrictor
Replace or clean restrictor.
Flow is lower than desired
Controller oscillates
Pressure drop or inlet pressure
Adjust pressures
(applicable to MFC)
deviates from calibrated values
Oversized orifice
Check orifice size.
Valve out of adjustment
Adjust valve, see calibration procedures
(section 4.4)
Unstable inlet pressure
Check external pressure regulator
Defective p.c. Board
Contact Brooks Instrument
Section 4: Maintenance
