Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
24
Bench Troubleshooting
1. Establish a proper connection between the MF-series Smart Mass Flow
Meter or Controller and a +15 Vdc to +28 Vdc power supply and connect an
output signal readout device (4½ digit voltmeter recommended) to pins
5 of 6 row and 4of 6 row of the terminal strip. Switch on the power and allow
the instrument to warm-up for 45 minutes. In case of a Controller model,
adjust the Set point to zero. Do not connect the device to a gas source yet.
Observe the output signal and, if necessary, perform the zero adjustment
procedure (section 3.2). If the output signal does not zero properly, please
contact Brooks Instrument.
2. Connect the instrument to a source of the same gas used for its original
calibration. Regulate the Set point to 100% flow and adjust the inlet and
outlet pressures to the calibration conditions. Verify that the output signal
reaches 5.00 volts and stabilizes at that value. Vary the command voltage
over the 1 to 100% range and verify that the output signal follows the Set
point. If possible, connect a flow measurement device to monitor the actual
flow behavior and verify the accuracy of the mass flow instrument. If the
mass flow instrument performs as described above then it is functioning
correctly and the problem may lie elsewhere.
Table 4-1 lists possible malfunctions which may be encountered during bench
troubleshooting.
For controller models only: Apply +5 to the +15 Vdc valve override pin (pin 5
of 9 row) and verify the output signal falls below 2%.
4.3 Cleaning Procedures
When deposition makes it necessary to clean the MF-series Smart Mass Flow
Controller or Mass Flow Meter, use the following procedures:
1. Remove the unit from the system.
2. Purge with dry nitrogen gas, which removes virtually all particulate matter
from the device. Should contamination persist, subject all wetted
1
components
to ultrasonic cleaning. Following this, purge the device thoroughly with dry
nitrogen once again.
3. If the sensor is contaminated, remove the sensor and use a hemostat or
tweezers to push a 0.007”-diameter piano wire through the flow-sensor tube
to remove any contamination (end closest to the control valve). The sensor
tube can then be flushed with a solvent that leaves no residue. This can be
accomplished conveniently using a hypodermic needle filled with solvent.
NOTE:
Do not soak the sensor assembly in a cleaning solution. If solvent
seeps into the sensor assembly, it will probably damage the sensor, or at least
significantly alter its operating characteristics.
4.4 Calibration Procedure
The calibration of MF-series Smart Mass Flow devices is not described in this
manual. Such calibration requires the use of accurate and traceable calibration
equipment such as Brooks Volumeter equipment, in addition Smart Service
software model 0163 is needed.
1. Wetted components include the body, laminar-flow element and all valve components including
the orifice, process adapters and inlet filter.
Section 4: Maintenance
