Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
25
However, if the above equipment is available at your facility, then Brooks
Instrument will supply you with copy of the calibration procedure document
(no.:834-P-088-AAG) upon request.
4.5 Valve (Dis)Assembly Procedure
NOTE:
If (dis)assembly is required, but the necessary expertise or equipment
is not available, then the instrument should be returned to the factory.
However, if the requisite equipment is available at your facility, Brooks
Instrument will supply you with copy of the valve (dis)assembly procedure
document (no.: 834-L-030-AAG) upon request.
The model MF53S control valve assembly consists of an axially mounted
main valve driven by the top-mounted pilot valve. The main valve should not
be disassembled. If necessary, please return the Mass Flow Controller to the
factory.
4.6 Housing (Dis)Assembly Procedure
In the event that it is required to adjust the hardware settings in the main or
digital board (I.e. jumper settings or switches) the following tools are needed:
1) 1/4” Hex screw for removal of the top cover
2) 3mm Hex screw (130 mm long shaft) for removal of the housing
Section 4: Maintenance
