Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
28
Power
+15Vdc to +28Vdc (use only 24 Vdc for NO
requirements
valves and for use of MF51) +24Vdc only for all
Profibus units
Power Consumption
Models MF60 S, MF61 S, MF63 S and MF64 S
Mass Flow Meters
for + 24 Vdc (± 10%) at 80 mA
for + 15 Vdc (± 5%) at 90 mA
Also applicable for Profibus
Power Consumption
Models MF50 S, MF51 S and MF53 S
Mass Flow
for + 24 Vdc (± 10%) at 140 mA
Controllers
for + 15 Vdc (± 10%) at 185 mA
Also applicable for Profibus
NOTE:
With valve override function activated:
the total power consumption specifications are:
for + 15 Vdc at 285 mA or
for + 24 Vdc at 370 mA
Also applicable for Profibus
Temperature
Both ambient and process gas: 0-70 °C.
Leak Integrity
Outboard: 1 x 10-9 mbar l/sec. Helium
Security
To prevent “unauthorized” setting or reranging of
span or zero, these functions are only accessible
via the Brooks Smart Control, model 0160, or
using Smart DDE, model 0162.
Warm-up time
< 10 minutes; 1% F.S. accuracy.
Performance within specifications: 45 minutes.
Damping
Damping from 0 to 10 seconds is possible for
(not for Profibus)
the flow output signal (default setting is 0.5 sec.)
Response
Standard response of the flow output signal 1 sec.
(Meters)
Response of better than 0.2 seconds on request.
Settling Time
Standard 1 sec. Settling time or up to 0.2 seconds
(Controllers)
is possible (to within 2% full scale of final value)
for any command (Set point) step; virtually
without any dead time, over- or undershoot.
Model MF53S 3 sec. (1 sec. on request).
Section 5: Specification
