Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
10
2-4 Return Shipment
Prior to returning any instrument to the factory visit the Brooks website www.
BrooksInstrument.com for a Return Materials Authorization Number (RMA#),
or contact one of the following locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Brooks Instrument
Neonstraat 3 1-4-4
Kitasuna Koto-Ku
6718 WX Ede, Netherlands
Tokyo, 136-0073 Japan
P.O. Box 428
Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands
Fax 011-81-3-5633-7101
Tel 31-318-549-300
Email: [email protected]
Fax 31-318-549-309
E-mail: [email protected]
Instrument must have been purged in accordance with the following:
All flow instruments returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination Statement, along with a Material Safety
Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks personnel.
Copies of these forms can be downloaded from the Brooks website
www.BrooksInstrument.com or are available from any Brooks Instrument
location listed above.
2.5 Gas connections
All models are fitted with the following inlet and outlet connectors as standard:
NPT(F), tube compression fittings, VCR, VCO, DIN or ANSI flanges. Prior to
installation, make certain that all piping is clean and free of obstruction. Install
the piping in a manner that permits easy access to the instrument, should it
need to be removed for cleaning or test-bench troubleshooting.
Section 2: Installation
