4-1
Brooks
®
Model SLA5840
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
October, 2017
4-1 Overview
No routine maintenance is required on the Brooks Digital RT's. If an in-line
filter is used, the filtering elements should be periodically replaced. This
section provides the following information:
• Troubleshooting
• Gas Conversion Factors
• Restrictor Sizing
4-2 Troubleshooting
