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GASGUARD
®
TE10 Distribution System Manual
Air Products and Chemicals, Inc.
Page 3 - 14
3.9 Helium Leak Test Port (Optional)
A helium leak test port may provided on the vent header for connection to a helium
mass spectrometer. Two manual valves are included in theassembly. The Leak
Test Isolation Valve (MV31) isolates the helium leak test port, and the Vent
Isolation Valve (MV22 or MV32) isolates the downstream vacuum venturi/vent
system to achieve vacuums required for inboard leak testing upstream. An access
hole is provided for insertion of the vacuum hose from the leak detector into the
enclosure for hookup to the VCR port. When leak testing is complete, the Leak
Test Isolation Valve(MV31) must be closed and the VCR port capped. The Vent
Isolation Valve, (MV22 or MV32), should be opened and left open during normal
operation of the distribution system.
This port is for vacuum service only. Do not
connect pressurized gas to this port.
3.10 Hazardous Gas Leak Detection System
(Customer Requirement)
A gas leak detection system must be installed by the customer for all toxic gases
used in the
distribution system
. The detection points must include the interior of the
distribution system
and the upstream source cabinet. If a leak is detected, the
system must provide a signal that will shutdown the distribution system and the gas
cabinet. See specific I/O field wiring drawings provided in the document
envelope, supplied with this manual.
A hydride leak detection system is highly recommended for silane and other
pyrophoric gases. Although these gases will normally ignite and burn immediately
when they leak to atmosphere, under certain conditions they can pocket and
detonate with devastating force. A hydride monitor can detect leaking silane and
shutdown the system eliminating or reducing the risk and size of explosion.
Summary of Contents for GASGUARD TE10
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