Air Products GASGUARD TE10, Installation, Operation And Maintenance Manual, Page: 140 / 196

GASGUARD
®
TE10 Distribution System Manual
Air Products and Chemicals, Inc. 8 - 16
11. Do not perform maintenance unless the line is purged with an inert gas
through the process tool. This must be performed using Manual Operation
detailed in Section 8.6.
8.4.3 Flow Purge Procedure
This procedure purges hazardous gas from the selected Line 1and process line to
the tool by flowing purge gas continuously through the Line 1 and venting at the
tool. This purge technique can be used to reduce the concentration of hazardous
gas to safe levels to allow maintenance to be performed on the process Line 1 and
downstream components.
It is the customer's responsibility to establish a purge time to reach safe levels
based on line length, purge flow rate and type of process gas. The vented gas
should be monitored for residual gas concentration before maintenance is
performed.
Flow purging can also be performed using Manual Mode.
1. Verify that the appropriate valves at the process tool have been opened to
allow flow through purging.
2. Press and enter the password.
3. On the Main Menu screen, press the Mode
Menu button for the Line you want to purge.