Section 7: System Description
Revision – September 2009
7 - 1
Section 7: System Description
The GASGUARD MC (Mass Customized) Distribution System may consist of a
valve manifold enclosure, a process gas manifold panel and a controller. The
systems may also be supplied with a free standing rack or a wall mounting frame.
GASGUARD Distribution Systems are designed and built for the safe handling of
high purity toxic, flammable, pyrophoric, corrosive, oxidizing, reactive, and non-
reactive gases. The systems have been designed in accordance with the applicable
requirements of the National Fire Protection Agency (NFPA), Uniform Fire Code
(UFC), Toxic Gas Ordinance (TGO), and Semiconductor and Equipment and
Materials International (SEMI).
7.1 Valve Manifold Enclosure
The function of the GASGUARD Valve Manifold enclosure is to ensure a safe
environment for personnel during operation and maintenance, or in the unlikely
event of a leak of hazardous gas. For certain areas and gases, regulations may
require that the enclosure must be connected to a properly designed exhaust system
that is continuously operated in order to ensure a safe environment outside the
enclosure.
The enclosure provides the secondary containment for any leak from the process
gas manifold panel. The exhaust system quickly carries any leaking hazardous gas
to a safe disposal system preventing its escape from the enclosure.
The GASGUARD Valve Manifold enclosure is constructed of 12 gage steel with
fully welded seams and protected with corrosion resistant polyurethane paint or
polyester powder coat finish. Two enclosure sizes are available to hold up to four
or eight manifold Branches. An exhaust stack is provided for connection to the
customer's exhaust system.
The enclosure has a 12 gage steel door with a window constructed of 1/4" thick
wire reinforced safety glass.
Summary of Contents for GASGUARD TE10
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