Air Products GASGUARD TE10, Installation, Operation And Maintenance Manual, Page: 184 / 196

GASGUARD
®
TE10 Distribution System Manual
Air Products and Chemicals, Inc. Page A - 4
Outside Diameter; Tube and Fittings
1/4" up to not including 1/2", +0.004"/-0.000";
1/2" to not including 1-1/2", +- 0.005";
1-1/2" up to not including 3-1/2", +- 0.010";
3-1/2" up to and including 4"; +- 0.015"
6.3
Interior Surface Finish Requirements:
6.3.1 The interior surface of each tube and fitting shall be electropolished to a
microinch surface roughness standard of 7 Ra microinch average (10 Ra
maximum).
6.4 Gases and Deionized Water for Drying, Cleaning, Testing:
6.4.1 Argon or nitrogen used for drying and packaging shall be supplied from a
liquid source and have the following point of use quality:
Minimum
purity: 99.998 percent
Moisture: Less than 1 ppm
Oxygen: Less than 3 ppm
Total Hydrocarbons: Less than 1 ppm
Filtered to no more than 10 particles per scf larger than 0.02 microns at point
of use.
6.4.2
Deionized water used for cleaning shall have the following minimum point of
use requirements and be verified on a monthly basis by an independent
laboratory:
Resistivity: 18 megohm centimeters @ 25°C minimum
Total Organic Carbon: Less than 50 ppb
Viable Bacteria Colonies: Less than or equal to ten/100 milliliters
Filtered to: 0.1 microns at point of use
DI water purity shall conform to the guidelines set forth be SEMI.
6.5
Tube Cleaning:
6.5.1 After electropolishing, tubing shall be final cleaned with deionized water as a
final cleaning agent and dried with filtered nitrogen. Freon shall not be used
as a cleaning agent.
6.5.2
Final cleaning of tubing shall be performed under Class 100 clean room
conditions.
6.5.3
Tube washing shall utilize heated DI water (60oC, minimum). The tube shall
be flushed with heated DI water until the resistivity of the effluent measures
at least 17.5 Megohm-cm for diameters less than 3 inches and 17.0
megohm-cm for diameters greater than or equal to 3 inches.