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Agilent Technologies G8610A, Operation Manual

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Agilent Technologies G8610A Operation Manual Download Page 109

Agilent Technologies Helium Leak Detector 

DRAFT 12/1

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109

Figure 6-4  Leak Detector Linear Output Voltage

Figure 6-5  Leak Detector Logarithmic Output Voltage

Output Voltage = Leak Rate Mantissa

Output Voltage (Volts)

*Standard and High Sensitivity Versions

Le

ak R

a

te (

S

td

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cc/S

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Leak Rate Mantissa = Output Voltage

V = LOG (Leak Rate X 10

11

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Output Voltage

Le

ak Ra

te atm

-cc/Se

c

Leak Rate = 10

V

/10

11

Summary of Contents for G8610A

Page 1: ...2 1 1 1 7 OPERATION MANUAL Vacuum Products Division Agilent Technologies Helium Leak Detector MODELS G8610A G8610B G8611A G8611B G8611C G8612A G8612B G8612C AND G8612D Manual No G8610 90002 Revision A December 2017 ...

Page 2: ...ht 2017 Agilent Inc Agilent Technologies Helium Leak Detector Contra Flow is a trademark or registered trademark of Agilent Inc Alconox is a registered trademark of Alconox Inc Apiezon is a registered trademark of M I Materials Ltd ...

Page 3: ...son including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty peri...

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Page 5: ...7 1 3 4 Startup 37 1 3 5 Turn Off Shutdown 40 1 4 Front Panel Display and Operations 41 1 5 Home Screen 43 1 6 Front Panel Display Home Screen Display 45 1 7 Rear Panel 48 1 8 Features 51 Section 2 Operating the Leak Detector 53 2 1 Screens 53 Section 3 Home Screen 55 3 1 Home Screen 55 3 1 2 Menus Screen 63 Section 4 Calibration Screen 65 4 1 Calibration Set Up 65 Section 5 Test Configuration Scr...

Page 6: ...unicating with RS 232 140 A 2 1 Windows HyperTerminal Set Up Instructions 140 A 2 2 Printing with HyperTerminal 142 A 3 Customer Accessible Inputs and Outputs 152 A 3 1 Serial Connector 152 A 3 2 I O Connector 152 Appendix B Introduction to Leak Detection 157 B 2 Agilent s Helium Leak Detection Technologies 157 B 3 Methods of Leak Testing 159 B 3 1 Vacuum Testing Method Outside in 160 B 3 2 Pressu...

Page 7: ...eak Detector with External DS302 DS602 Wet Rotary Vane Pump Model G8612A GS8612D 35 1 14 Bench Mount Leak Detector with External TS620 Dry Scroll Pump Model G8612 35 1 15 Bench Mount Leak Detector with External IDP 15 Dry Scroll Pump Model G8612C 36 1 16 Helium Background Timer 39 1 17 Front Panel Displays and Operations 41 1 18 Home Screen 42 1 19 Screen Flow 44 1 20 Rear Panel 48 1 21 Rear Panel...

Page 8: ...6 5 Leak Detector Logarithmic Output Voltage 109 6 6 System Settings Remote Settings 110 6 7 Systems Settings Password and Restrictions 111 7 1 Maintenance General 113 7 2 USB Port 114 7 3 Insert USB Drive 114 7 4 Internal Calibrated Leak 115 7 5 Internal Calibrated Leak Keypads 116 7 6 Calibrated Leak 117 7 7 Manual Tuning 118 7 8 Maintenance Valve Control 121 7 9 Valve Control Models G8610B G861...

Page 9: ...Leak Detector D R A F T 1 2 1 1 1 7 9 B 3 Locating Leaks Outside In 160 B 4 Measuring Leaks Outside In 160 B 5 Measuring Leaks Inside Out 161 B 6 Locating Leaks Inside Out 161 B 7 Accumulation Inside Out 162 B 8 Vacuum System 163 ...

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Page 11: ...etector Operating States 58 3 2 Leak Detector Condition States 58 6 1 Range Stop Sensitivity Requirements 107 7 1 Leak Detector Valve State Table Single Mechanical Pump System 122 7 2 System Information Screen Conditions 127 7 3 Current Setup Screen Conditions 128 8 1 Scheduled Maintenance 133 8 2 As Required Maintenance 133 8 3 Fuses and Circuit Breakers 134 8 4 Leak Detector Spare Parts 136 8 5 ...

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Page 13: ...following documentation standards NOTE Notes contain important information CAUTION Cautions appear before instructions which if not followed could cause damage to the equipment or data loss WARNING Warnings appear for a particular procedure or practice which if not followed correctly could lead to serious injury or death ...

Page 14: ... They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Agilent All warning and cautions must be read carefully an...

Page 15: ...r enclosure and the Touch Panel display use only a soft cloth slightly dampened with water or a mild soap Do NOT use excess water or cleaning solvents of any kind Avoid splashing any cleaning solvents into the unit through the ventilation openings or Front Panel buttons Wipe the surface with a dry lint free cloth CAUTION Do not clean any aluminum parts with Alconox Alconox is not compatible with a...

Page 16: ...e drying are required following cleaning with VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Other acceptable solvents are isopropyl alcohol IPA or Dow Corning OS 20 CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task this prevents scratching of any...

Page 17: ...spectrometer Equipment General Environment of intended use Indoors use in an industrial and laboratory installation only Altitude up to 2000m POLLUTION DEGREE 2 Material group III Operating Temperature 12 C to 40 C Relative Humidity RH up to 90 max non condensing Storage ambient conditions RH from 0 to 95 non condensing temperature 20 C to 60 C WARNING Do not use in presence of flammable or explos...

Page 18: ...y cause smears In general the lower the temperature the longer it takes the Touch Panel display to turn on Performance of the Touch Panel display may deteriorate in low temperature Radio The Wireless Remote Control and Base Board PCB are built around Laird s model RM024 RF transceiver module operating in 2 4 GHz ISM band The same type of the RF module is built in an Agi lent Technologies Helium Ma...

Page 19: ...f 20 cm or more between the oper ator and the RF antenna of the leak detector with a wireless base station CAUTION Use only approved type of antennas for Wireless Remote Centurion Model WCP2400 MMCX2 www centurion com Agilent Technologies Helium Mass Spectrometer Leak Detector Wireless Base Station Nearson Model S181FL 5 RMM 2450S www nearson com Power and Static Sensitivity WARNING Depending on t...

Page 20: ...CC Rules These limits are designed to provide reasonable protection against harmful interference when it is operated in a commercial environment This equipment generates uses and can radiate RF energy which if not installed and used in accordance with the instructional manual can cause harmful interference to radio communications When this equipment is operated in a commercial environment operatio...

Page 21: ... to operate for the local mains supply voltage The equipment can be damaged by Incorrect mains AC supply voltages Radio Frequency RF and Electrostatic Discharge ESD energy inputs that exceed the maximum ratings Operating in very high temperatures or without adequate ventilation Immersion in liquids Physical abuse All electrical connections must be performed by a qualified electrician and must comp...

Page 22: ...to the atmosphere CAUTION Do not use grease or any other substance on O rings or metal seals that will come in contact with the spectrometer CAUTION If the spectrometer magnet comes in contact with a magnetic surface the magnet can become degraded causing the spectrometer to lose sensitivity Pumps WARNING To avoid injury use proper lifting techniques when moving pumps Two people may be required to...

Page 23: ...pectrometers on an exchange basis NIST traceable calibrated leak testing and verification services Preventive maintenance services Overhaul services System recertification Support agreements On site support Please see our catalog or contact us to learn about available services Contacting Agilent In the United States you can contact Agilent Customer Service at 1 800 882 7426 See the back cover of t...

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Page 25: ...30 VAC configurations see Table 1 1 on page 26 The wireless remote control has the following capabilities RF communication between Agilent Technologies Helium Mass Spectrometer leak detector Base Station or Host and the Wireless Remote unit from the distance up to 100 m 300 ft Enter the leak detector unit into Test and Hold modes from the Wireless Remote unit keypad Read the leak detector unit s l...

Page 26: ... Portable G8610 64002 100 VAC 2 2 2 4 Portable G8610 64003 115 VAC 2 4 2 2 Portable G8610 64004 230 VAC 1 2 1 2 G8611A DS302 Mobile G8611 64000 115 VAC 9 0 5 4 Mobile G8611 64001 230 VAC 4 4 2 5 G8611B TS620 Mobile G8611 64002 115 VAC 7 7 6 8 Mobile G8611 64003 230 VAC 3 8 3 4 G8611C IDP 15 Mobile G8611 64004 115 VAC 6 0 4 2 Mobile G8611 64005 230 VAC 2 8 3 0 G8611D DS602 Mobile G8611 64006 230 VA...

Page 27: ...ctor with Internal DS40M Wet Rotary Vane Pump Model G8610A and the G8610B which utilizes a Agilent IDP 3 dry pump Figure 1 1 Portable Leak Detector with Internal DS40M Wet Rotary Vane Pump Model G8610A and Portable Leak Detector with Internal IDP 3 G8610B Dimensions Figure 1 2 shows the outline drawing and physical dimensions of a mobile leak detector with Models G8611x Figure 1 2 Mobile Leak Dete...

Page 28: ...l Startup High Pressure Test Setup and Shutdown 1 2 2 1 Unpacking WARNING Unpacking the Leak Detector Always work in a team of at least two people Wear personal protective equipment PPE including gloves boots and a weight belt to avoid injury 1 Remove from Skid 1 Take the entire skid and box to an open area Remove the shipping straps and pull the cardboard box straight up over the leak detector Sa...

Page 29: ...leak detector placed between the two sets of wheels by gently tilting the leak detector a few degrees sideways and pulling the foam out Keep castor wheels locked until specified to unlock them b Removing the wooden block preventing the castor wheels from moving by unscrewing the wing nuts Figure 1 5 Set the wing nuts aside Figure 1 5 Mobile Unit c Gently rolling the leak detector off skid ...

Page 30: ... on the leak detector to prevent excessive rattle and noise during operation Figure 1 6 Figure 1 6 Shipping Locks 1 Use a flat tip screwdriver to remove the side walls from the leak detector cart Remove the panels and set aside 2 For the IDP 15 model also remove the rear panel of the cart opposite of the handle to access the rear of the pump opposite the pump cooling fan If any remove and file pap...

Page 31: ...ch to turn the locks clockwise to loosen the IDP 15 ship locks only tighten loosen and are not removable Figure 1 8 Figure 1 8 IDP 15 Shipping Locks Loosening For the TS620 pump use a 10 mm driver to remove the shipping bolts one on each side of the pump base Figure 1 9 Figure 1 9 TS620 Shipping Locks Removal ...

Page 32: ...mp model leak detectors Figure 1 10 Figure 1 10 Oil based Pumps 1 Use a funnel when adding oil fill to the center of the sight glass marking 2 For the DS40 M open the top unit of the leak detector side away from screen Figure 1 11 Figure 1 11 DS40 M Oil Access Mobile units that require oil DS302 and DS602 units open the bottom cart and fill to middle of sight glass marking Figure 1 12 ...

Page 33: ...Fill Powering Up 1 Ensure that the roughing pump is switched on and if applicable IDP 15 set to the correct voltage setting 2 Switch the leak detector on cover the leak detector inlet with a blank off cap provided and already in place and wait for the screen to read System Ready before operating ...

Page 34: ... Pollution Pollution Degree 2 per EN61010 1 Standard Fixed Mains Socket Outlet Connect to a building protective earthing system Installation requirements are described in Table 1 2 Additional ventilation requirements for your specific application are discussed in Section 1 3 2 Recommended Additional Services on page 36 When installing a bench system with a mechanical pump the power cord for that p...

Page 35: ...Detector with External DS302 Wet Rotary Vane Pump Model G8612A with individual components shown Figure 1 13 Bench Mount Leak Detector with External DS302 DS602 Wet Rotary Vane Pump Model G8612A GS8612D Figure 1 14 is a drawing of a Bench Mount Leak Detector with External TS620 Dry Scroll Pump Model G8612B with individual components shown NOTE Cut the black tubing into two equal parts as shown Figu...

Page 36: ... s exhaust to reduce the particulate count and the helium background signal When using oil lubricated mechanical pumps use an oil mist eliminator on the exhaust port of the mechanical pump to reduce the oil mist from the exhaust Oil mist eliminators can however become saturated with oil causing slower pumping speeds and higher helium backgrounds in the leak detector The replacement time interval o...

Page 37: ...h system with a separate backing roughing pump turn the pump on The Test button is disabled on start up until System Ready appears on the Home screen Once the leak detector boots up a startup wizard appears on the touch panel display allowing you to change the time and language 3 Select choice of language time type AM PM 24 and system setup The System Ready indication appears on the Home screen If...

Page 38: ...creen c Select Calibration option d Press Calibrate with Internal Leak Mode Full The system performs an automated internal calibration of the system External leak a Press VENT to vent the leak detector and then install a calibrated leak into the system test port and press TEST on the Home screen b Select Calibration option from the Menus selection c Press Calibrate with External Leak Defaults fast...

Page 39: ...celed NOTE The firmware initially starts at a large time interval but recalculates the required time as the pumping continues The new time is reflected on the timer NOTE Test Configuration Menu Applications Setup High Sensitivity automates and walks you through the E 10 External Calibration procedure Figure 1 16 Helium Background Timer NOTE When calibration is complete the leak detector reverts to...

Page 40: ...ult to open To do a shutdown CAUTION A soft power shut down CPU and Electronics and Turbo Pump is highly recommended before shutting off the main power switch circuit breaker 1 Go to the Menu Tab 2 Select Turn Off NOTE Do not turn off the main power switch until the power down status bar is complete and final power off message is accepted OK To do a hard shut down of the leak detector for 24 VDC p...

Page 41: ... R A F T 1 2 1 1 1 7 41 1 4 Front Panel Display and Operations All operator control and monitoring are achieved via the resident software accessed using the Touch Panel Display Table 1 3 on page 45 Figure 1 17 Front Panel Displays and Operations ...

Page 42: ...eak Rate is presented in a scientific notation XXE YY with appropriate units Where X X mantissa is a leak rate value E Y 10 YY exponent is a leak rate range X and Y are any numbers from 0 to 9 System Status and or Mode are represented on the screen in alpha format on the screen and an italic font in this manual Parameters are represented on the screen in alphanumeric format a bold font in this man...

Page 43: ... in the Vent or Hold states pressing the TEST button automatically advances the leak detector through roughing then through the various test states depending on the achievable test port pressures and leak rates Press the TEST button while in TEST to isolate the test port from the leak detector vacuum system HOLD With the leak detector in Test Fine Test mode press TEST again and the leak detector g...

Page 44: ...gilent Technologies Helium Leak Detector 44 D R A F T 1 2 1 1 1 7 The leak detector operator interface functions through a series of screens which are navigated as in Figure 1 19 Figure 1 19 Screen Flow ...

Page 45: ...eneral Description Screen Purpose Home Accesses the Menu screens Activates the Test Vent and Zero functions Activates the Gross Leak Test screen when Gross Test is initiated via the Zero button Home Menu Bar Activates deactivates Power on off soft shut down Zero Enable Graph Mode Speaker Volume Application in Use Home Screen Icon ...

Page 46: ... Features Activates High Pressure Test Fine Test Only Auto Zero 0 Gross Test Transfer to Test Stabilization Wait Application Setup Activates Sniff Method Spray Method High Sensitivity Auto Sequencer Split Flow PPM Sniff Method Settings Main Configures Date Time Leak Rate Pressure Units Language Touch Sound Activation Screen Settings Configures Bar Graph Selection Range Selection Analog Output Sele...

Page 47: ...perating hours and Last Service Date Enable Exhaust Pump Gauge Calibration Configures Calibrates the Test Port TC s Vacuum and ATM reference points Displays Test port and spectrometer pressures System Defaults Configures Ability to reset Turbo and Filament hours for maintenance purposes Ability to reset back to Factory Defaults System Information Displays part number and serial number Display Soft...

Page 48: ...ector A 9 pin male D type connector to interface with an external PC via RS 232 type communications protocol for system diagnostic or control A detailed summary of information related to serial communication is provided in Section A Communications Protocol on page 139 Cover Plate or I O PCB Access to expansion slot This is not used when an optional I O PCB is installed A rear panel of the optional...

Page 49: ...s return negative Chassis Earth Terminal Provided for additional connection of the leak detector to the building grounding system to improve ESD protection Product Label A product label with part number serial number and rating infor mation USB Port A standard or high speed USB port for software updates Exhaust A barbed hose fitting OD 12 57 mm to exhaust the mechanical pump 10 Oil Level Cover Oil...

Page 50: ... type communications protocol for system diagnostic or control A detailed summary of information related to serial communication is provided in Section A Communications Protocol on page 139 Power Entry Module Provides supply power overcurrent and EMI protection for the leak detector The Power Entry Module consists of Power Input Connector An IEC EN60320 C20 standard three prong grounded inlet conn...

Page 51: ...e minute Zero Control Selectable mode background elimination with a unique patented Autozero 0 feature Leak Indication A bar graph linear or log indicator displays leak rates automatically alphanumeric indication on Touch Panel display A leak can also trigger an audible alarm frequency that varies in proportion to the size of the leak dedicated volume control and programmable audio threshold Analo...

Page 52: ...or s leak rate in a linear and log arithmic bar graph format with a numeric range indicator and Sys tem status in alphanumeric format on the Wireless Remote unit s Touch Panel display Configuration up to 10 different leak detector unit s for wireless control by toggling through a MAC address list using one Wireless Remote unit Discrete I O Control This provides 12 outputs and 8 inputs lines optica...

Page 53: ...ked and cannot be activated due to a higher level selection in the setup Indicates the status of the internal calibrated leak If flashing the leak calibration will expire within 10 days Steady and blue indicates that the leak has expired Steady and red indicates a temperature sensor failure or a disconnected cable to the calibrated leak temperature sensor Indicates the leak detector is in split fl...

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Page 55: ...rols Figure 3 1 Home Screen Digital Leak Rate Display Test Port Pressure Gross Test button not shown Leak Detector Status Table 3 1 on page 58 Condition Indication Table 3 2 on page 58 Reject Status Indicator System Ready Indicator Menus button Valve state Zero Alphanumeric leak rate Units of measurement Menu Power Off Zero Enable Graph Speaker Volume Control Home Vent Test Hold Setpoints Status w...

Page 56: ...re intended to protect the leak detector from damage due to over pressure conditions Use an external pressure transducer if the test process requires a more accurate monitoring of the test object pressure Leak Detector Status Appears below the test port pressure reading and indicates the cur rent leak detector operating state The normal operating states are detailed in Table 3 1 on page 58 Leak De...

Page 57: ...system background This feature also reduces test cycle times by reducing the amount of time required for background levels to naturally clean up or by allowing testing to begin at relatively high test pressures It is recommended that only two decades of signal be zeroed out Menus Displays the Menus screen Figure 3 2 Section 3 1 2 on page 63 Figure 3 2 Main Menu Select Power Off Performs a soft shu...

Page 58: ... 9E 7 to 1E 11 MDL 5E 12 Hold Indicates that the leak detector is in Hold mode When in Hold mode all but the foreline valves are closed isolating the test port and any test objects or fixturing from the leak detector vacuum system Use Hold when you want to keep the test port under vacuum without venting the test volume this helps the system clean up Roughing Indicates that the leak detector is cur...

Page 59: ...Low Indicates that the gain value required to calibrate the leak detector during the calibration routine is less than the minimum allowable value This is generally the result of a system leak High Background Indicates a high Helium background detected during calibration self test This typically indicates a vacuum system leak No Ion Peak Indicates a tuning calibration failure due to the system not ...

Page 60: ...itial startup and is cleared after the first test cycle Zeroing Indicates that the leak detector is in the process of Zeroing out a background signal The Zero routine is initiated automatically during the startup and calibration routines or manually when the operator presses the Zero button on the Home screen Zeroing Wait Indicates that the system is setting the initial zero values during the star...

Page 61: ...tored to the level it was at prior to being turned off Timer Toggles the graphing time between 120 and 720 seconds The timer automatically defaults to 120 seconds on leak detector start up Press the toggle button while graphing to clear the current graph The data rate for the timers are 120 seconds two measurements second 720 seconds one measurement three seconds Clear Clears the plotted graph The...

Page 62: ...real leak Only use the Zero button after the helium tracer gas source has been removed The Zero capability allows the testing of sensitivity levels that are below the system background This feature also reduces test cycle times by reducing the amount of time required for background lev els to naturally clean up or by allowing testing to begin at relatively high test pressures It is recommended to ...

Page 63: ...nus on the Home screen The Menus screen appears Figure 3 5 Use the arrow to navigate to the previous screen The Menus screen consists of buttons to access the lower level screens used for application specific configuration Figure 3 5 Menus Screen Press a button to access specific configurations ...

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Page 65: ...nternal or external calibrated leak Set the calibration mode Full or Fast Calibration The calibration routine can only be executed while in Test FineTest Figure 4 1 Calibration Set Up NOTE The internal leak is a factory supplied helium leak internal to the leak detector In order to perform an external calibration you must supply a separate calibrated leak and mount it on top of the leak detector S...

Page 66: ...m notes the leak rate reading turns the leak off and zeros the system A gain is calculated from the leak rate reading to make the signal match the value of the calibrated leak and returns the system to Test mode NOTE Figure 4 2 appears within the first twenty minutes of operation if calibrate is selected This message advises you that a twenty minute warm up is strongly recommended after a cold sta...

Page 67: ...g process is complete system gain is adjusted to bring the leak detector into calibration A full calibration takes less than three minutes Fast Calibration Compares the leak rate signal with the calibrated leak value and adjusts the gain to bring the system into calibration If the gain value is above the upper gain limit for the working range as defined in Table 6 1 on page 107 then the fast calib...

Page 68: ...s if the background signal is sufficiently low to give an accurate calibration If the System has pumped out sufficiently the calibration proceeds Background is changing indicating the system is still pumping away background helium a countdown timer appears Figure 4 3 The system monitors the helium background and shows the time until the calibration begins Should you prefer not to wait a Cancel but...

Page 69: ... failure indication disappears Multiple set points are used when you want to indicate several levels of acceptance There are times when you may want to assure the leak detector is working properly by bounding the failure limit For example if LEAK RATE 1 were set as per above then any leak rate below 1 0E 8 would pass the part Also assume that the leak detector was not seeing helium it would always...

Page 70: ...is ON then the rear panel output for that set point goes active when its leak rate value is exceeded and an activated red box indication appears on the Home screen Each set point is set to activate above or below the programmed value To activate the reject set point Above the programmed value select the Below the programmed value select the Audio Set Point Settings On The audio tone rate increases...

Page 71: ...et point is ON audio sounds only for leak rates above the audio set point To configure reject set points and the audio set point 1 Press the blue check for the Reject Set Point 2 Press the value button associated with the set point The data entry pad appears 3 Enter the set point and press OK 4 Press the or soft key to select whether the reject setpoint activates above or below the programmed valu...

Page 72: ...Turn the High Pressure Test feature on to start the test cycle This automatically locks the leak detector into Contra Flow Leak mode and auto ranges through all decades down to the most sensitive Contra Flow range When the leak detector is in Test mode Turn the High Pressure Test feature on to perform the same function with the exception of performing the test cycle start sequence Fine Test Only S...

Page 73: ... the arrows are on If the arrows remain on for more than a few seconds press Zero to set operating parameters to the correct zero value This situation can occur if the leak detector had not been fully warmed up when a previous cali bration was initiated Auto Zero 0 Inactive When Auto Zero 0 is inactive the leak detector does not automatically adjust the zero reference point when the helium backgro...

Page 74: ... There is an audio tone for Gross Leak testing which increases as the leak increases Gross Test only works when the test port pressure is between 10 and 150 Torr and remains constant 2 between previous and current pressure readings The Gross Leak test stops if the system goes into Backing Test or Fine TEST mode Activating the Auto Sequencer button terminates the Gross Leak test The HOLD button is ...

Page 75: ...he test pressure cross over point at which the system transfers from Roughing into Test and then into the Contra Flow Test mode In the Contra Flow Test mode the gas sample is pumped through the leak detector and swept across the high vac uum pump foreline The Contra Flow mode allows for higher sensi tivity testing at exceptionally high test pressures The maximum test port pressure is 10 Torr NOTE ...

Page 76: ...ing on the display and adjust the power probe flow valve for a test port pressure of 0 5 to 1 Torr 2 Torr maximum This pressure setting allows for very rapid system response High Pressure Test mode sensitivity is 10 4 to 10 8 atm cc sec at test port pressures between 1 and 2 Torr using the power probe When High Pressure Test is activated range stop defaults to 10 7 atm cc sec High Pressure Test mo...

Page 77: ... screen when the test port pressure is between 10 and 150 Torr 2 Press GROSS TEST to enter the screen There is an audio tone for Gross Leak testing which increases as the leak increases Gross Test only works when the test port pressure is between 10 and 150 Torr and remains constant 2 between previous and current pressure readings The Gross Leak test stops if the system goes into Backing Test or F...

Page 78: ...Agilent Technologies Helium Leak Detector 78 D R A F T 1 2 1 1 1 7 Figure 5 6 Home Screen Gross Test Active 5 1 3 Application Setup Figure 5 7 Application Setup ...

Page 79: ...ms Adjusting the sampling pressure for best response and clean up and establishing an alarm should the sniffer probe become plugged To access 1 Select Test Configurations Applications Setup 2 Select Sniff Method and press Set Up and Figure 5 8 appears Figure 5 8 Sniff Method At this point The leak detector locks into High Pressure Test Test only Auto Zero 0 is disabled Minimum Range defaults to 10...

Page 80: ...be Alarm A distinct high frequency tone different from the Audio Set Point 1 This alarm is useful in alerting the operator that the desired Power Probe Sniffing Probe adjustment pressure has changed A High Limit can be selected in alerting that too much flow high test port pressure is present A Low Limit trigger is typically the norm indicating that the Power Probe Sniffing is blocked or the tubin...

Page 81: ...st Configurations Applications Setup 2 Select Spray Method and press Set Up and Figure 5 9 appears Figure 5 9 Spray Method At this point Auto Zero 0 is enabled Buttons and Fields Set Point 1 Desired Alarmed Leak Rate value This value can be adjusted from 10 10 to 10 4 Set Point values in Spray applications are usu ally programmed for greater than the acceptable leak rate limits Audio Set Point Des...

Page 82: ...ree setup configurations Spray 1 3 The information icon provides the necessary directions for a suc cessful external calibration Calibrate External calibration Sensitivity check Follow the step by step pro cess NOTE The external calibration routine for the Spray Method is typically performed on large chamber applications for proper characterization of the leak rate measurement ...

Page 83: ... by step guidance on the external calibration procedure Employs additional software routines to improve stability at low leak rates To access 1 Select Test Configurations Applications Setup 2 Select High Sensitivity and press Set Up and Figure 5 10 appears Figure 5 10 High Sensitivity To perform a calibration process internal and external for a precision 10 10 leak rate accuracy and stability NOTE...

Page 84: ...etting tells the system when to perform the test against the set point values For example you may set 20 seconds for the TEST TIME At the end of 20 seconds the system determines if the part has passed or not and then makes an indication by either going to VENT Pass or going to HOLD Fail and displaying the reject set point failure on the front panel Press Auto Sequencer Set Up on the Menus screen T...

Page 85: ... rough ing phase when you cycle Put the system into TEST mode the rough timer records and displays the rough time so that you can enter a rough time value close to what was recorded For example if the rough timer records a value of 12 seconds you can then enter a value in the rough time that is slightly longer than what was recorded 15 seconds for example The rough timer only records a time when t...

Page 86: ...2 and Pressure Set Point settings which provide the criteria for pass or fail conditions Within the auto sequencer feature there are two variables that must be set Rough Time and Test Time Rough Time This setting indicates to the system the maximum time for the leak detector to be in Roughing mode If the Rough Time is exceeded the test aborts and the system goes into Hold This is a failed condi ti...

Page 87: ...is extremely helpful in zeroing out unwanted background associated with the test fixture The zeroing set up helps in reducing the test time 5 1 3 8 2 Auto Sequencer Set Up Attach the test fixture with the part to be tested known good test object on to the leak detector test port 5 1 3 8 2 1 Rough Time Setup Determines the amount of allowable time for the leak detector to evacuate the test object t...

Page 88: ...point 2 for the desired leak rate reject set point 5 1 3 8 2 5 Using Set Point 1 and 2 together Optional Some applications utilize a reference leak during the test cycle to validate that the leak detector is still calibrated and sensitive to helium Set Point 1 is set up for the leak rate reject level Set Point 2 is set for the reference leak NOTE If the leak rate falls below the reference leak val...

Page 89: ...Leak detectors are frequently connected to vacuum systems in parallel with other vacuum pumps This can cause errors in readings when testing to a specific value is important Split Flow properly compensates for flow differences caused by additional pumps Settings available in this mode include Setting the value of the installed reference leak Step by step guidance in setting the split flow value En...

Page 90: ...he leak detector displays the corrected leak rate essentially calculating a split flow gain value The leak detector automatically calculates the split flow factor turns on and calculates the range stop based on the split flow factor When Split Flow is turned OFF the system reverts back to the uncorrected leak rate This process must be repeated when reactivating split flow To setup 1 Connect the le...

Page 91: ...ample 5E 1 std cc sec He standard leak measures 5E 5 std cc sec He on the Agilent Helium Leak detector The out of range Installed Leak Value can be entered and Extended Split Flow can be activated NOTE The software limits split flow to no more than 1000 times 3 decades If the split flow is turned ON and the leak rate entered is more than 1000 times higher than the system leak rate the system will ...

Page 92: ...calibrate to a known concentration Using a mass flow meter optional for accurate measurement regardless of pressure Entering set point values for audible and visual alarms Establishing an alarm should the sniffer probe become plugged NOTE Calibrate the leak detector prior to the PPM Sniff Application To run this 1 Select Test Configurations Applications Setup 2 Select PPM Sniff Method press Set Up...

Page 93: ... Measuring PPM of Helium with an Alicat Scientific Brand Mass Flow Meter on page 94 Inputting the flow rate sccm from any Mass Flow Meter or Mass Flow Controller via the displayed flow rate reading value at the adjusted test port pressure to obtain the calculated Helium PPM concentration Measuring PPM of Helium with a non Alicat Scientific brand Mass Flow Meter on page 98 NOTE Parts per million PP...

Page 94: ...ed between 5E 1 Torr 1 Torr 4 Enter the Helium concentration in PPM in the associated field 5 Press the Calibrate button Figure 5 14 on page 92 and follow the step by step instructions The leak detector is now ready to measure the concentration of Helium in PPM 5 1 3 10 4 Measuring PPM of Helium with an Alicat Scientific Brand Mass Flow Meter Scientific confidence added through accurate computatio...

Page 95: ...mbly notes Apply Teflon pipe tape onto threads of item B to ensure proper seal with minimal leakage When connecting item B to item C push in 1 4 pipe as far into nut as can be allowed Then snug nut to finger tight torque Using a 9 16 wrench turn nut 1 and 1 4 turns 360 90 450 total for proper crush seal with the ferrule inside This fine metering valve is the same type of valve as used in the Agile...

Page 96: ...ibration button on the PPM Sniff application is only to calibrate using a known PPM mixture The leak detector is now ready to measure the concentration of Helium in PPM 5 1 3 10 5 Mass Flow Meter Setup Configuration Figure 5 19 depicts the connection required to use the Alicat mass flow meter in a test setting This setup connects from the leak detector test port to the fine metering valve assembly...

Page 97: ... may be used alone by itself as a sniffing probe though it will not have a handle Figure 5 20 Hose Fitting Connection Agilent part number R0305 an adapter from KF25 to 3 16 ID hose may be purchased as part of the power probe kit Agilent part number K95565305 the entire power probe sniffer assembly The molded plastic casing of the power probe may be re purposed by removing the valve and copper tubi...

Page 98: ...f the system if the operator already has a power probe handle that is not in use the gun portion of the probe may be disassembled striped of all valves and copper tubing and reassembled with a 1 16 hose inside It is important however not to have another metering valve in series above the mass flow meter This is for optimizing response time Of course this only provides a convenient handle A naked h...

Page 99: ...er KCP250125 if using the power probe as the metering valve Figure 5 22 3 Perform an internal calibration 4 Perform an external calibration using the sniffing probe by a Selecting Calibration Calibrate With External Leak b Entering the value of the external calibrated leak Keep the probe at the inlet of the standard leak c Pressing Calibrate Figure 5 22 External Sniff Calibration Setup 5 Select Te...

Page 100: ... system and remove the mass flow meter If the test port pressure remains constant the flow rate should not change Do not adjust the metering valve on the back of the sniffing power probe without recalibrating 4 Vent the leak detector and remove the mass flow meter if desired for faster helium signal response time 5 Install the power probe back onto the leak detector and put the system into Test ...

Page 101: ...nits of atm cc sec which is a measure of mass flow rate cubic centimeter volumes filled with 1atmosphere of pressure that flows into the leak detector inlet every second The unit atm atmospheres is the same type of unit as Torr a measure of pressure 1 atm 760 Torr Additionally cc cubic centimeters is the same type of unit as liters 1 liter 1000 cc The helium leak rate measurement taken from the le...

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Page 103: ... The Settings Menu consist of the following Main Settings Date and Time setup Leak Rate and Pressure Units selection and Language selection Screen Output Settings Bar graph appearance Leak Rate Ranging Selections and Analog Output selections Remote Control Wireless activation and channel selection Passwords and Restrictions Restriction level and password selection plus leak detector control lockou...

Page 104: ...tting Main Settings With the Settings Menu open select the Main Settings Menu as shown below Figure 6 1 Settings Main Settings Buttons and Fields Date Time Display and configure the current date and time Units Select leak rate units atm cc sec mbar l sec Torr l sec Pa m3 sec Cubic ft yr Select pressure units Torr Mbar Pascal ...

Page 105: ... 6 2 Date and Time 1 Activate a field by touching within the date and time field 2 Scroll and select the correct date and time 3 Press OK to exit the screen or continue with Units and Languages Select Touch Sound for an audible touch tone for all touch screen selections and inputs 6 2 2 Screen Settings The Screen Settings is a personalized menu that configures the leak detector s bar graph leak ra...

Page 106: ...ntissa of the leak rate spanning from 0 to 10 The numerical display located to the upper right of the bar graph indicates the leak rate exponent value This mode offers exceptional resolution within a decade Log Scale The log bar graph leak rate appears across the top of all screens In Log Bar Graph display mode the bar graph display represents the entire leak rate range of the leak detector spanni...

Page 107: ...e Configures the leak detector so that it only auto ranges down to the pre selected decade To allow auto ranging to the maximum sensitivity of the system turn Maximum Range Off This feature is useful when a product specification is more than one decade less stringent than the actual sensitivity of the leak detector If the leak detector is capable of displaying full scale E 11 atm cc sec but the te...

Page 108: ...re NOTE For added accuracy add 06 to Vout Leak Rate 10Vout 06 1011 Bar Graph Configures the bar graph Linear Only The linear bar graph leak rate appears across the top of all screens when selected In the Linear Bar Graph display mode the bar graph display represents the mantissa of the leak rate spanning from 0 to 10 The numerical display located to the upper right of the bar graph indicates the l...

Page 109: ...ear Output Voltage Figure 6 5 Leak Detector Logarithmic Output Voltage Output Voltage Leak Rate Mantissa Output Voltage Volts Standard and High Sensitivity Versions Leak Rate Std cc Sec Leak Rate Mantissa Output Voltage V LOG Leak Rate X 1011 Output Voltage Leak Rate atm cc Sec Leak Rate 10V 1011 ...

Page 110: ...at establishes communication between the leak detector and Agilent s wireless hand held remote control Use this menu to activate the leak detector s wireless baseboard option and to assign the RF channel number that the remote hand held device will link with Communications with the leak detector Control of the leak detector Figure 6 6 System Settings Remote Settings ...

Page 111: ...t Figure 6 7 Systems Settings Password and Restrictions NOTE VENT TEST and ZERO buttons are still accessible in all password levels Buttons and Fields Restrictions Activates deactivates the password function Medium Allows operation Home Screen of the Test Vent Zero functions Locks out all menu selections other than the Calibration Menu Allows Internal External Calibration High Locks out all menu s...

Page 112: ...em hold and Zeroing during test while under remote or PLC control 6 3 Wireless Information relating to wireless communications MAC Address Two MAC addresses appear on this screen The MAC address at the top of the screen is the leak detector MAC address The MAC address above the hand held button is the MAC address of the hand held device SYNC Channel For informational and factory debug purposes onl...

Page 113: ... Manual Tuning Spectrometer tuning parameters Valve Control Valve status Pump Primary Roughing Pump configuration Gauge Test Port TC calibration System Defaults Reset Turbo Filament hours This Maintenance menu General allows you to view and input the value and parameters of the installed internal calibrated leak A Software Update utility is also now available Figure 7 1 Maintenance General Access ...

Page 114: ...all that is needed The USB port is located in the back of the leak detector Figure 7 2 Figure 7 2 USB Port 1 Select the Software Update option You are prompted to insert the USB drive into the back of the leak detector Figure 7 3 Figure 7 3 Insert USB Drive 2 Inset the USB drive 3 Select Continue The software update takes no more than 15 seconds 4 Power off the leak detector as instructed and powe...

Page 115: ...Use this screen to set the Internal Leak Value Temperature Coefficient or Expiration Date The Internal Calibrated Leak screen appears Figure 7 4 Figure 7 4 Internal Calibrated Leak To use this screen 1 Press tap the underlined highlighted field to activate its associated keypad A keypad appears Figure 7 5 ...

Page 116: ...rnal calibrated leak as shown on the CALIBRATION Menu is compensated for temperature using the calibrated leak temperature sensor The calibrated leak is not compensated for temperature if any of the following conditions exist The temperature sensor on the calibrated leak fails or there is a cable connection problem The temperature sensor reading is out of the operating range The operating temperat...

Page 117: ...he actual value and information of the internal calibrated can be found on the calibration certificate that shipped with the leak detector or shipped with the field installed calibrated leak The label on the internal calibrated contains also contains all the necessary information as shown in Figure 7 6 ...

Page 118: ...justment The emission current parameter tunes the leak detector maximizing the leak detector output for a peak helium signal Typical Emission current values range from 0 6 mA to 1 2 mA Ion Voltage Displays the current ion voltage value of the spectrometer Ion Source The ion voltage parameter tunes the leak detector maxi mizing the leak detector output for a peak helium signal Typical ion voltage v...

Page 119: ... by the same percentage which can affect system transfer points Typical gain values range from 0 5 to 3 0 The higher the gain the more noise shows up in the least sensitive range To change a Gain parameter 1 Press the numerical Gain value The numerical value has a grayed out dimmed appearance NOTE For all tuning parameters press Cancel to revert back to the original value or press Done to initiate...

Page 120: ...eally the ION value should be between 205 and 240 Adjust the EMISSION to attain the maximum value Ideally the EMISSION value should be between 0 600 and 1 200 Set the GAIN so that the leak rate on the screen matches the value of the internal leak you wrote down 5 Navigate to the Calibration Menu and turn the Read Standard Leak OFF ...

Page 121: ...reen to monitor and control the valves in the leak detector vacuum system for troubleshooting purposes See Figure 7 10 on page 123 for an illustration of the leak detector vacuum system Figure 7 8 Maintenance Valve Control Figure 7 9 Valve Control Models G8610B G8611B G8611C G8612B G8612C Valve Status color code ...

Page 122: ...able 7 1 Leak Detector Valve State Table Single Mechanical Pump System Leak Detector Operating State V1 Foreline Valve V2 V3 Contra Flo w Valve Test Mode V4 V5 Midstage Valve Fine Test Mode V6 Calibrated Leak V7 Vent Valve V8 Ballast Valve V8 Exhaust Valve Vent O C C C O C O Rough C O C C C C C Gross Leak Test C O C C C C N A Contra Flow Test O O C C C C O Midstage Test O C O C C C O Hold O C C C ...

Page 123: ...iagram Normally open valve powered closed during all operations Model G8610B G8611C G8612C G8611B during the roughing sequence Test Port Spectrometer Test Port thermocouple Calibrated Leak V5 V4 V2 V3 V6 V7 V1 V1 Foreline V2 Contraflow1 V3 Contraflow2 V4 Midstage1 V5 Midstage2 V6 Cal Leak V7 Vent V8 Exhaust V8 ...

Page 124: ...s and Last Service Date Figure 7 11 Maintenance Fore Pump Buttons and Fields Last Serviced Select the date on which the oil is changed or the tip seal is replaced The system then tracks the operating hours since the pump was last serviced or when a new fore pump is installed Lists the Last Service date for the exhaust Pump and operating hours Enable Exhaust Pump screen This screen appears for dry ...

Page 125: ... indicates the pressure is less than the lowest displayable pressure of the TC gauge which is 1 0E 03 Use this screen to perform a calibration on the test port thermocouple gauge Calibrate the thermocouple gauge for the most accurate operation Select Gauge Calibration from the Maintenance Menu selection Use this screen to Set a calibration point at atmosphere Set a calibration point at a low vacuu...

Page 126: ...given 7 4 6 3 Maintenance System Defaults Use this screen to reset Turbo hours plus Filaments 1and 2 hours and restore system defaults This screen displays the on time hours for the turbo pump and filaments When replacing a turbo pump or a filament ensure that the hours are reset This aids in scheduling an effective maintenance service Figure 7 13 Maintenance System Defaults Button and Fields Rest...

Page 127: ...tion Screen Conditions Condition Display Description Ion Source Filament See Section 7 4 3 Manual Tuning on page 118 Filament 1 Off Filament 1 is selected and not lit Filament 1 On Filament 1 is selected and lit Filament 2 Off Filament 2 is selected and not lit Filament 2 On Filament 2 is selected and lit Gain Gain Gain Value Displays the gain that applied to the leak rate The actual helium signal...

Page 128: ...t Point Active Audio Set Point is active Audio Set Point Inactive Audio Set Point is inactive Auto Sequencer See Section 7 4 1 Current Setup Menu on page 128 Auto Sequencer On Auto Sequencer automatic test cycle is enabled Auto Sequencer Off Auto Sequencer automatic test cycle is disabled Calibration Set Up See Section 4 Calibration Screen on page 65 Int Cal Leak System is set to calibrate to the ...

Page 129: ... Stop Exp System is set to display the most sensitive leak rate range 10 Exp The range stop line shows only if range stop is on Reject Set Point See Section 7 4 1 Current Setup Menu on page 128 Reject 1 2 3 4 Active Reject set points displayed are active this line is blank when all set points are disabled or inactive Split Flow See Section 5 1 3 9 Split Flow on page 89 Shows split flow only if the...

Page 130: ... Detector 130 D R A F T 1 2 1 1 1 7 1 Select Power Off 2 Wait for the Status Bar to fill to 100 3 Press OK and turn off the power switch located in the back of the leak detector Figure 7 17 Power Off Figure 7 18 Power Off Confirmation ...

Page 131: ...s section contact Agilent Customer Service See the back cover of this manual for a listing of our sales and service offices Important Reminders In addition to the safety notes at the beginning of this manual heed the following notes cautions and warnings when performing maintenance WARNING Disconnect power from the leak detector before performing any maintenance procedure that requires physically ...

Page 132: ...surfaces Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Do not use grease or any other substances on O rings or metal seals that will come in contact with the spectrometer Do not use alcohol methanol or other solvents on O rings as this causes deterioration and reduces their ability to hold a vacuum NOTE If applicabl...

Page 133: ...on Most Common Symptom Spectrometer cleaning The spectrometer is designed to operate for years without maintenance however actual performance depends on the leak detector operational environment Spectrometer cleaning restores optimum performance if the unit shows significant sensitivity loss or high background signal Sensitivity loss appears as a high gain value after a calibration or failure to c...

Page 134: ...r Bussmann S505 4A Turbo Controller F2 Spectrometer header replacement Filament replacement Ion source assembly replacement or cleaning Table 8 3 lists the fuses and circuit breakers NOTE Only a qualified technician should replace circuit breakers and fuses Use only circuit breakers and fuses of the same type and rating Tuning adjustments If calibration is not successful or if the system is calibr...

Page 135: ... 1 If specification is still not met Manual Tuning may be required See Section 7 4 3 Manual Tuning on page 118 8 2 Dry Nitrogen Vent You may want to vent the leak detector test port with dry nitrogen when the system is vented Venting with dry nitrogen can be helpful in very humid environments to keep the test port as dry as possible which reduces the time required to pump down the system NOTE The ...

Page 136: ...y G8610 68003 Spectrometer Assembly Exchange G8610 69008 Ion Source Replacement Kit VSFLDHIS Filament Replacement Kit VSFLDHFR Metal Gasket Kit VSFLDMG Valve Block O ring Kit VSFLDOV Calibrated Leak Internal VSFLDCL TC Gauge R3391301 Fan Assembly VSFLDFN Power Supply VSFLDPS Spec Tube Cleaning Kit 670029096 Fan IDP3 Pump VSFLDFN3 Back to Air Maintenance Kit V9 VSFLDV9 Exhaust Valve V8 VSFLDV8 Turb...

Page 137: ...M Rotary Vane Pump 220 V G8610A X3703 64001 IDP 3 Exchange Scroll Pump 220 V G8610B EXIDP3A41 IDP 3 Exchange Scroll Pump 120 V G8610B EXIDP3B41 IDP 3 Exchange Scroll Pump 100 V G8610B EXIDP3C41 IDP 3 Tip Seal Kit G8610B IDP3TS Diaphragm Pump Maintenance Kit G8610B G8611B G8611B G8612B G8612C VSFLDDP Diaphragm Pump Replacement Kit G8610B G8611B G8611B G8612B G8612C VSFLDDPR Elite Z Mechanical Pump ...

Page 138: ...hrottle Valve NW25 Flange R1947301 Calibrated Leak 10 5 10 6 NW25 Flange F8473325 Calibrated Leak 10 7 NW25 Flange F8473321 Calibrated Leak 10 8 NW25 Flange F8473322 Calibrated Leak 10 9 NW25 Flange F8473323 Calibrated Leak 10 10 NW25 Flange F8473324 Oil Mist Eliminator G8610A VSFLDME 1 1 8 Compression Test Port VSFLDCP I O Assembly Field Installed VSFLDIO Handheld Wireless Remote Unit G8600 60002...

Page 139: ...ice to set the current state or value of a volatile leak detector parameter INIT are commands for the controlling device to set non volatile leak detector parameters Other commands do not require a parameter and do not begin with any special characters Successful inquiries respond with data followed by a space then ok CR LF as specified in the tables of this appendix Unsuccessful inquiries respond...

Page 140: ...cter Terminate the command with a carriage return CR Transmit the intended command one character at a time Wait for an echoed response from the leak detector before transmitting the next character Terminate the command with a carriage return CR Windows 95 and later versions contain a serial communications program called HyperTerminal a useful tool in establishing communication between the leak det...

Page 141: ...e and verify the port settings are correct 11 Ensure that the Settings tab is configured as follows Terminal keys radio button selected Ctrl H radio button selected Auto detect selected from the Emulation pull down list ANSI entered in the Telnet terminal ID 500 set in the Background buffer lines field 12 Click ASCII Set Up The ASCII Set Up dialog box appears 13 Ensure that the settings are as fol...

Page 142: ...ears 3 Navigate to a location enter a file name and select a file type txt text file Notepad doc Word xls Excel 4 Click Save The Capture Text dialog box reappears 5 Click Start to log data 6 Select Transfer Capture Text Stop to end text capture 7 Open the file where the data was stored and select File Print Example To use the above procedures to poll the leak detector leak rate using HyperTerminal...

Page 143: ... 2005 is mm dd yyyy date 04 19 03 35 is hh mm ss ms time and 1 is PM 0 AM 1 PM 2 24 hour DISPLAY Reports what the display bar graph is set to log or lin EMISSION Reports the emission value EXPONENT Reports the current manual mode exponent with a two character minus followed by one digit number The exponent is within the least sensitive range as reported by RANGE and the three lower more negative e...

Page 144: ...Reports two lines Each begins with a cr lf The first line consists of the words test port TC followed by a number in mTorr The second line consists of the words system TC followed by a number in uTorr PWDLEVEL Response will be a number 1 2 or 3 PWDONOFF Reports status of system password ON or OFF QUICK CAL Reports whether Fast or Full Calibration is chosen if a calibration were to be started RANGE...

Page 145: ...DLEAK SYSLEAK Reports the leak rate value that has been stored that relates to the split flow functionality SYSPWD Reports the value of the system password TEST Reports the currently stored Test Sequencer test time used as part of setting up the Auto Sequencer TEMPFACTOR Reports the internal calibrated leak temperature factor that is used as part of the temperature correction logic degrees C TURBO...

Page 146: ...a 24 hr clock 2 02 12 2005 04 16 33 1 1 INIT DATE Tuesday February 12 2005 4 16 33 PM CURRDATE reports the stored value INIT DISPLAY Sets the status of the bar graph display to either a log or linear display Preceded by 1 Log or 0 Linear INIT EMISSION Sets the emission of the ion source Preceded by a three digit number micro amps in the range 60 to 165 INIT EXPONENT Sets the range that the leak de...

Page 147: ...w mode crossover pressure in Torr Preceded by X XE XX The range is 1 0E 03 to 1 0E 01 Torr The default is 1 0E 01 100 mTorr INIT PASSWORD Sets the system password Preceded by a 1 to 6 digit password and followed by a digit indicating the number of digits in the password Example 123123 6 INIT PASSWORD Password is read back using the SYSPWD command X INIT PWDLEVEL X is the password level from 1 to 3...

Page 148: ...w feature must be OFF when this parameter is set Preceded by a two digit leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit leak range exponent the helium leak rate number in atm cc sec Example 3 4E 08 INIT SYSLEAK INIT STDLEAK Sets the value of the internal leak Preceded by a two digit leak rate mantissa with a decimal point after the first digit f...

Page 149: ...nt Preceded by two or three characters XX or X Table A 4 Leak Detection Actions Command Action AUTO Initiates auto ranging mode Success is indicated by the normal ok response CALIBRATE Initiates a Full or Fast calibration depending on system settings The CPU software tunes then adjusts the gain so that the current helium signal causes the current leak rate measurement to be the same as the most re...

Page 150: ...nse Does nothing in auto ranging mode Does nothing upon reaching the least sensitive range INTERNAL Sets the Internal Calibrated Leak as the leak to be used during calibration KEEP Causes the leak detector to close most valves and enter the Hold state MANUAL Turns the Manual Ranging Mode ON Success is indicated by the normal ok response NOSNIFF Turns the HIGH PRESSURE TEST function OFF ROUGH Cause...

Page 151: ...um response to helium VENT Causes the leak detector to isolate and vent the test port to the atmosphere XYZZY Unlocks the system so that all RS 232 commands are accessible ZERO Sets the current leak rate measurement to be 0 0 atm cc sec in the most sensitive range Table A 4 Leak Detection Actions Continued Command Action ...

Page 152: ...ull modem cable where pins 2 and 3 are crossed Figure A 1 Serial Connector Map A 3 2 I O Connector Table A 6 lists the optional discrete I O PCB P N R2111501 pin signals This I O connector provides a means for a controller usually a PLC to control or to determine the leak detector status The I O is accessible via a type DB25S female socket connector Table A 6 I O Connector Pin Signals Pin No Signa...

Page 153: ...T O Level Active HIGH when the leak detector is in READY mode Indicates that the leak detector is completing a STARTING routine and that the filament and turbo are OK 7 TEST_OUT O Level Active HIGH when the leak detector is in FINE TEST mode Indicates that the leak detector is ready for fine leak testing 8 REJECT1_ OUT O Level Active HIGH when the leak rate is over set point 1 Indicates that the v...

Page 154: ...k detector to change from AUTO to MANUAL ranging Default is AUTO 14 CAL_IN I 200 ms Pulse Active HIGH pulse Initiate CALIBRATING routine with Internal Calibrated Leak Zeroing routine is included 16 ZERO_IN I 200 ms Pulse Active HIGH pulse Initiate ZEROING routine 18 HOLD_IN I 200 ms Pulse Active HIGH pulse Initiate HOLD routine and isolate the test port and any test objects from leak detector vacu...

Page 155: ...t Circuit Sketch 24 RDSTDLK_ IN I Level Active HIGH when standard leak is ON Initiate the INTERNAL STANDARD LEAK reading routine 25 PARALLEL_ ENABLE_IN I Level Active HIGH when ENABLE is active Activation causes the leak detector to take inputs only from the rear panel I O or RS 232 port No control functions inputs from the front panel or wireless are allowed Table A 6 I O Connector Pin Signals Co...

Page 156: ...hows the input circuit sketch All inputs are optically isolated 3300 Ohm resistive loads in series with the LEDs of the opto isolators and voltage level from 5 VDC to 24 VDC The required pulse inputs are 200 ms minimum pulse width Figure A 3 Optically Isolated Input Circuit Sketch ...

Page 157: ...ns B 2 Agilent s Helium Leak Detection Technologies A Mass Spectrometer Leak Detector MSLD is a complete system for locating and or measuring the size of leaks into or out of a device or a container This method of leak detection is initiated when a tracer gas helium is introduced to a test part that is connected to the MSLD system The helium leaking from the test part diffuses through the system i...

Page 158: ...alled Selective Ion Pump Detection Figure B 2 The sensor technology incorporates an ion pump connected to a quartz capillary tube and maintained under high vacuum This membrane is heated with a coiled platinum filament Once heated the membrane becomes permeable to helium As the partial pressure of helium in the ion pump increases so does the current draw of the ion pump This current is proportiona...

Page 159: ...ple a vacuum system is tested with a vacuum inside the chamber while a compressed air cylinder should be tested with a high pressure inside the cylinder There are two general concerns when leak testing One is the location of leaks and the other is the measurement of the total leakage rate of the part as some leakage may be acceptable In many cases parts may be first tested to determine if they pas...

Page 160: ... To pinpoint the location of the leak s but not measure the total leakage rate helium is administered to the suspected leak sites of the part using a spray probe with an adjustable flow Figure B 3 Figure B 3 Locating Leaks Outside In B 3 1 2 Measuring Leaks To determine the total quantity of leakage but not the number or location of leaks the part is connected to the leak detector and shrouded by ...

Page 161: ... bombing or backfilling small hermetically sealed parts Larger parts can be actively pressurized using a hose or tubing to deliver the helium The part is placed in a volume that is then evacuated by the leak detector All the helium escaping from the part is captured and quantified Figure B 5 Figure B 5 Measuring Leaks Inside Out B 3 2 2 Locating Leaks To pinpoint the location of the leak s but not...

Page 162: ...s that are under vacuum while in operation should be leak tested under vacuum while pressurized systems should be charged with helium to a pressure similar to operational conditions when possible B 3 3 1 Vacuum Systems In general vacuum systems are tested with a portable leak detector Typically the leak detector is connected by means of a tee connected in between the foreline of the high vacuum pu...

Page 163: ...e helium signal is diminished proportionally For example if a mixture of 10 helium and 90 nitrogen is used the signal reads 10 of the actual value of the leak or a decade lower This may be acceptable in many cases as system leak checking is usually to locate rather than quantify leaks Once the system has been charged with an appropriate amount of helium leak checking can be performed by means of a...

Page 164: ...um vessels and systems Pressurized parts and assemblies Air conditioning and refrigeration assemblies Radiators heat exchangers and condensers Brake fuel and hydraulic lines Gas tanks Food storage tanks and packaging Body implantable medical devices High purity piping B 4 2 Maintenance of Systems Many vacuum process tools in fabs of all types require occasional leak checking This may be part of a ...

Page 165: ... these systems are Semiconductor process equipment PVD CVD equipment E beam and ion beam processing equipment B 4 4 Mass Produced Parts Some manufacturing processes require the integration of a leak checking device into a multi step process usually with very high production rates Component leak detectors are designed specifically for these applications in which a vacuum system and the control elec...

Page 166: ... in a densely constructed industrial facility or power plant In these cases a mobile cart mounted MSLD may not be practical A truly portable unit such as the PHD 4 is required Some examples of such applications are Aircraft manufacturing and maintenance Power generating plants Pressurized pipelines Bioreactors and fermenters Petrochemical plants and refineries Underground tanks Large condensers or...

Page 167: ... l sec for N2 and He at 60Hz in Contra 42 l sec 50Hz Contra w DS302 3 0 liters sec for N2 and He at 60Hz 2 5 l sec 50 Hz Contra w TS620 6 0 liters sec for N2 and He at 60Hz 5 0 l sec 50 Hz Contra w IDP 3 1 1 l sec 60 Hz 1 0 l sec 50 Hz Midstage 1 8 liters sec for He at 50 or 60 Hz Helium Response Time 0 5 second within 66 of peak reading within the given time Per AVS 2 1 Test Port NW 25 A 11 8 28 ...

Page 168: ...1010 1 12 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use Part 1 General Requirements UL Std No 61010 1 3rd Edition Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use Part 1 General Requirements EMC Emissions and Immunity ETSI EN 301 489 1 v2 2 0 2017 03 Electromagnetic Compatibility and Radio Spectrum Matters ERM Electro...

Page 169: ... 2 1 1 1 7 169 Contra cross over 10 Torr decreasing 12 Torr increasing Sensitivity in High Pressure Test mode 1 x 10 8 atm cc sec Table C 1 Leak Detector Series Specifications Continued Specifications Agilent Technologies Helium Mass Spectrometer Versions ...

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Page 171: ...he core product e g inlet screens vent valves x Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue x If ordering an Advance Exchange product p please use the packaging from the Advance Exchange to return the defective product x Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for ...

Page 172: ...umped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic hazardous materials Include product nam...

Page 173: ...ized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale x Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and c...

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