8
2.
Before using this unit
Requirements for Installation
13. List of vacuum pump piping
Item
Model
Manufacturer
Vacuum
pump model
Suction
port of
pump
Necessary piping part
DP83/104C
(40NW flange)
Yamato
PD(PX)136
*1
PD(PX)201
*1
Ф30mm
ID Ф25mm vacuum rubber hose 1pc
Vacuum quick-release adapter 1pc
Clamp (25KF) 1pc
Clamp (40KF) 1pc
Center ring with O-ring (25KF) 1pc
Center ring with O-ring (40KF) 1pc
Vacuum quick-release reducer joint
(25-40KF) 1pc
SIEG
2ZX-4B,220V
25KF
flange
Stainless steel vacuum rubber hose 1pc
Clamp (25KF) 1 pc
Clamp (40KF) 1 pc
Center ring with O-ring (25KF) 1pc
Center ring with O-ring (40KF) 1pc
Vacuum quick-release reducer joint
(25-40KF) 1 pc
Mitsubishi
VP-SW
-A200(S)
-A310(S)
25KF
flange
Stainless steel vacuum rubber hose 1 pc
Clamp (25KF) 2 pc
Clamp (40KF) 1 pc
Center ring with O-ring (25KF) 2 pc
Center ring with O-ring (40KF) 1pc
Vacuum quick-release reducer joint
(25-40KF) 1 pc
Oerlikon
Leybold
D8C
D16C
25KF
flange
Stainless steel vacuum rubber hose 1 pc
Clamp (25KF) 1 pc
Clamp (40KF) 1 pc
Center ring with O-ring (25KF) 1pc
Center ring with O-ring (40KF) 1pc
Vacuum quick-release reducer joint
(25-40KF) 1 pc