Series 655
INSTALLATION
979645EA
Edition 23.09.2019
23/112
4.3.4
Requirements to sensor connection
To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time:
< 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time
is not degraded by this connection it needs to meet the following requirements:
•
Inner diameter of connection pipe: > = 10 mm
•
Length of connection pipe:
< = 300 mm
These conductance guidelines must include all valves and limiting orifices that may also be present. Make
also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor
should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may
introduce noise to sensor output and should be avoided or shielded.
Isolation Valve
(optional)
Process
Chamber
L1 + L2 < = 300 mm
L1
min. 10 mm
min.
10 mm
Pressure Sensor
L2
