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Series 655

DESIGN AND FUNCTION

979645EA

Edition 23.09.2019

15/112

3.2.1

Pressure control system overview and function

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.

Example: Downstream control

1 Valve

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Controller and actuator

7 Cable to remote control unit

8 Cable to power supply

9 HV Pump

eff

Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (mbar)

p Pressure (mbar)

or units used in USA

eff

= 12.7 • Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (sccm)

p Pressure (mTorr)

Seff

Содержание 655 Series

Страница 1: ...he valve ordering number s 65548 GQ 2 sensor inputs analog outputs 65548 AQ 2 sensor inputs analog outputs 15V SPS 65548 HQ 2 sensor inputs analog outputs PFO 65548 CQ 2 sensor inputs analog outputs 1...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...ening torque 20 4 3 1 Mounting with centering rings 21 4 3 2 Mounting with O ring in grooves 21 4 3 3 Admissible forces 22 4 3 4 Requirements to sensor connection 23 4 4 Electrical connection 24 4 4 1...

Страница 4: ...Display information 77 5 6 1 Power up 77 5 6 2 Operation 78 5 6 3 Error 78 5 7 Safety mode 78 5 8 Operation during power up 79 5 9 Behavior in case of power failure 79 5 10 Operation under increased...

Страница 5: ...Series 655 979645EA Edition 23 09 2019 5 112 12 1 2 Controller 110 12 1 3 Accessories 110 13 Appendix 111...

Страница 6: ...pressure control applications Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Descrip...

Страница 7: ...ER connector SENSOR Actuator type Stepper motor with servo control Ingress Protection IP30 Sensor input Signal input voltage ADC resolution Sampling time 10 10 V Ri 100 k 0 1 mV 2 ms connector SENSOR...

Страница 8: ...sition control capability 58000 steps full stroke Closing time throttling only full stroke 0 9 s typ 0 5 s typ Opening time throttling only full stroke 0 9 s typ 0 5 s typ Closing time throttling isol...

Страница 9: ...00 unheated and under clean conditions 1 000 000 unheated and under clean conditions Admissible operating temperature 10 C to 120 C Mounting position horizontally only Wetted materials Body 655 A Alum...

Страница 10: ...differential pressure on plate during isolation 1200 mbar in either direction Max differential pressure on plate during opening and throttling 5 mbar Min controllable conductance N2 molecular flow Typ...

Страница 11: ...tion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acc...

Страница 12: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Страница 13: ...Series 655 DESIGN AND FUNCTION 979645EA Edition 23 09 2019 13 112 3 Design and Function 3 1 Design symbol picture...

Страница 14: ...IC2 calculates the required gate position to achieve the set point pressure Actuation is performed by 2 stepper motors one for pendulum and the second for stroke An encoder monitors the position This...

Страница 15: ...differences Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pu...

Страница 16: ...s is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proce...

Страница 17: ...cal overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it does...

Страница 18: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 19: ...he valve with space for dismantling and air circulation as shown in figure below 4 2 2 Connection overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Actuator...

Страница 20: ...oil under screw head 2 is bigger than 0 12 Lower friction coefficients may damage the valve as the resulting preload force gets too high Therefore for other friction coefficients the torque needs to b...

Страница 21: ...20 13 15 hole depth mm hole depth inch DN250 10 65548 16 0 63 4 3 2 Mounting with O ring in grooves Valve size ISO F JIS ASA LP ISO F JIS ASA LP max tightening torque Nm max tightening torque lbs ft...

Страница 22: ...ation and malfunctioning of the valve Do not higher force the valve body as specified The following forces are admissible Valve size Axial tensile or compressive force FA Bending moment M N lb Nm lbf...

Страница 23: ...owing requirements Inner diameter of connection pipe 10 mm Length of connection pipe 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present Make als...

Страница 24: ...spark Connector pins or electronic parts could damage if plugged and unplugged under power Do not plug or unplug connectors under power 4 4 1 Ground connection The connection point at chassis FE must...

Страница 25: ...ternal 15 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module for schema...

Страница 26: ...way from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 24V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws wit...

Страница 27: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with 4 4...

Страница 28: ...away from noise sources Connect Power supply 24 GND and GND 15V 15V at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connect...

Страница 29: ...locate it away from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only scr...

Страница 30: ...way from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws...

Страница 31: ...In addition there are 2 digital inputs and 2 digital outputs Digital inputs may be operated either by switches or by voltage sources Active digital inputs have higher priority than DeviceNet commands...

Страница 32: ...INSTALLATION Series 655 32 112 Edition 23 09 2019 979645EA 4 4 3 2 Power connector Configuration with voltage source for digital inputs...

Страница 33: ...itched off The function can be set to function INTERLOCK CLOSE INTERLOCK CLOSE has priority over INTERLOCK OPEN 14 INPUT COMMON Common for all digital inputs See also 4 4 3 4 Digital output Pin Functi...

Страница 34: ...CAN_L Blue DeviceNet signal The DeviceNet interface is galvanic isolated from control unit 4 4 4 1 Micro Connector Pinout Male pins at valve controller Female sockets at DeviceNet cable 4 4 5 Service...

Страница 35: ...et Baud rate and Address for valve must be selected Refer to chapter Interface configuration DeviceNet for details 4 SENSOR CONFIGURATION Basic configurations of the valve must be adapted according to...

Страница 36: ...es when the valve performs the homing procedure Standard Do homing after restart if valve is not in sealed state Open Command Do homing on an open command Move Command Do homing on any move command At...

Страница 37: ...y in Pressure Controller Object Class ID 100 4 6 3 Digital I O On the power connecter there are two digital inputs and two digital outputs available See chapter Power and sensor connection to get more...

Страница 38: ...in the unit of Range Data Unit Example for a 250mTorr linear sensor Upper Limit 250 0 Lower Limit 0 0 Range Upper Limit Voltage Value Range Lower Limit Voltage Value These parameters are only used for...

Страница 39: ...both sensors need to fit together in the crossover area otherwise crossover effect result nonlinearity Therefore sensor ratio should not be too high about 100 Crossover Mode Hard Switch Switching betw...

Страница 40: ...e zero adjust Sensor x Offset Value SFS 0 0 Sensor 1 Enable Sensor 2 Enable 0 It s not possible to execute a zero adjust A present offset value is ignored 1 It s possible to execute a zero adjust A pr...

Страница 41: ...plications do not need more than one controller units But if the result of the pressure control does not meet the expectations the different controller units can be an option for optimization With the...

Страница 42: ...can be reduced But control response time will be slowed down by this measure Learn Data Selection There are up to 4 different learn data sets available Select which Learn Data set the adaptive contro...

Страница 43: ...vailable Tv 500 sec Tv 500 sec Adaptive pressure controller Fixed pressure controller Fixed pressure controller Soft Pump Soft Pump Use the formula below to define the applicable pressure control algo...

Страница 44: ...re versus valve position data table This table is used to adapt the PID parameters The data table is stored in the device memory which is power fail save The data table can be up downloaded via Contro...

Страница 45: ...open Bit 7 Learn procedure terminated by program Bit 8 Pressure 0 at open position no gas flow set Parameter location CPA DEVICENET Pressure Control Adaptive Learn Limited access in S Single Stage Con...

Страница 46: ...CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR required lower cond...

Страница 47: ...ze over undershoot of pressure 5 10 15 20 25 0 5 10 15 pressure time New Target Pressure without pressure ramp Actual Pressure Target Pressure Target Pressure Used ramp 5 10 15 20 25 0 5 10 15 pressur...

Страница 48: ...parameter value Ramp Time Ramp Time is a value in the unit seconds After setting a new Target Pressure Target Pressure Used will converge the Target Pressure in the slope defines in parameter Ramp Slo...

Страница 49: ...ance with fixed PI pressure controller Tuning of control pressure performance with Soft pump refer to chapter Tuning of control performance with soft pump pressure controller 4 8 5 1 Tuning of control...

Страница 50: ...or connection Sensor delay adjustment Sensor delay adjustment effects Stability Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pres...

Страница 51: ...la depending on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure...

Страница 52: ...e OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typi...

Страница 53: ...me constant the adaptive control mode does not provide satisfying control performance In PI controller mode the parameters P gain and I gain have to be set according to the systems characteristics The...

Страница 54: ...pressure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot...

Страница 55: ...n results in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in ju...

Страница 56: ...ated for PI controller mode When switching to pump down control mode the P gain value evaluated for the PI controller has to be send to the valve controller When switching back into PI controller mode...

Страница 57: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Страница 58: ...ols Create Diagnostic File in Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description...

Страница 59: ...baudrate can be selected by a rotary switch which is also on the panel If a valid baudrate is selected 125kBaud 250kBaud 500kBaud the rate will be used and stored in the device memory as actual baudr...

Страница 60: ...e values Instance A specific and real physical occurrence of an object For example New Zealand is an instance of the object class Country The terms Object Instance and Object Instance all refer to a s...

Страница 61: ...protocol information Explicit messaging connections utilize a direct request response format which allow you to access any attribute data Explicit messaging is typically used for the setup configurati...

Страница 62: ...Request Messages to the appropriate handler object 3 Device Net 1 Provides the configuration and status of a DeviceNet port 4 Assembly 7 Input 3 Output Groups attributes of multiple objects into a sin...

Страница 63: ...DeviceNet interface 1 This command resets the DeviceNet interface to factory default settings Note All previously done configurations will be overwritten 4 10 5 Assembly Object Class ID 4 Groups attri...

Страница 64: ...CONTROLLER MODE ACCESS MODE 0 1 3 5 6 1 2 2 1 1 7 0 1 5 9 10 1 4 4 1 1 11 101 65h EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED OPEN CHECK 2 CONTROLLER MODE 0 1 3 5 6 1 2 2 1 1 7 0 1 5 9 10 1 4 4 1...

Страница 65: ...instance number of the assembly used by the poll connection to receive data data from valve to host BIT STROBE INPUT Not implemented CHANGE OF STATE CYCLING INPUT Set 16 5 4 101 1 X Get 14 X input as...

Страница 66: ...le for all executing commands Note A successfully established Poll IO connection switches the DEVICE STATUS to executing EXECUTING START 6 48 1 3 This command changes the DEVICE STATUS to executing st...

Страница 67: ...0 0 0 7 PCV Device Exception Detail Byte 3 0 0 0 0 0 0 0 0 8 Manufacturer Exception Detail Size 0 0 0 0 0 1 1 0 9 Manufacturer Exception Detail Byte 0 Warning Reserved Reserved External isolation valv...

Страница 68: ...ata sets which need to be downloaded separately Example Send 00000754241 48 48 48 48 48 55 53 52 50 52 49 Response 000 48 48 48 4 10 9 S Analog Sensor Object Class ID 49 Models the acquisition of a re...

Страница 69: ...re 9 sensor 1 high sensor 2 low crossover switch point 3 sensor 2 4 sensor 2 high sensor 1 low crossover fade 8 sensor 2 high sensor 1 low crossover target pressure 10 sensor 2 high sensor 1 low cross...

Страница 70: ...nstance 1 pressure Target pressure nominal pressure range is 0 10 000 sensor full scale But it may be scaled refer also to command GAIN for details X Instance 2 position Target position nominal positi...

Страница 71: ...arn adaptive control algorithm for correct learn gas flow and procedure LEARN PRESSURE LIMIT calibration scale Set 16 51 1 100 2 integer 4 float X Get 14 X learn pressure limit according to selected D...

Страница 72: ...eNet 2 Locked remote no access from service port THROTTLE CYCLE COUNTER Get 14 100 1 101 4 X X Data type is unsigned long integer A movement from max throttle position to open back to max throttle pos...

Страница 73: ...cture on the following page for details SENSOR 2 READING Get 14 100 1 109 2 integer 4 float Nominal range is 0 10 000 but it may be scaled Refer also to command GAIN and picture on the following page...

Страница 74: ...alled complete into the system 5 1 Normal operation This valve is designed for pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both case...

Страница 75: ...and maintenance How to start 1 Connect service cable USB A B cable male male between PC and valve A drive opens 2 Double Click on CPA exe to open the Control Performance Analyzer 3 Click Local for Loc...

Страница 76: ...t Local operation CPA Remote operation Refer to chapter Device Net interface Use target position control Explicit Set EXECUTING in S Device Supervisor if not already done Set SETPOINT TYPE in S Single...

Страница 77: ...it 1 Digit 2 Digit 3 Digit 4 1st Power On All dots are illuminated 2nd Valve series e g 67 0 6 7 0 3rd Firmware generation type e g 01 0C 0 1 0 C 4th Firmware version firmware e g 07 00 0 7 0 0 5th Co...

Страница 78: ...e By means of an external switch see connection diagrams Electrical connection the motor power supply can be interrupted In this case the valve enters the safety mode This motor interlock prevents the...

Страница 79: ...ition after homing is closed 5 9 Behavior in case of power failure Valve position before power failure Reaction of valve Without Power Failure Option PFO 655 G 655 A 655 T 655 V With Power Failure Opt...

Страница 80: ...em await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned in chapter Technical data 5 11 Behavior In case of compressed air p...

Страница 81: ...ve 2 Non volatile memory failure Replace valve controller 3 Analog digital converter of sensor input failure Replace valve controller 4 Initialization of motion controller failed Wrong motion controll...

Страница 82: ...ge detected Check if power supply is ok and is able to deliver needed power 9 6 SFV Position deviation axis1 to axis2 at homing procedure O Ring sticking 1 9 7 SFV Position deviation axis1 to axis2 at...

Страница 83: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Страница 84: ...depending on process conditions A critical factor influencing the maintenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate t...

Страница 85: ...Maintenance Tool 813330 Protection cover 833841 Clean room wiper Isopropyl alcohol Description Required tool 1 Vent both valve chambers 2 Refer to chapter Local operation and follow the instruction fo...

Страница 86: ...bonnet screws Allen wrench 5mm 8 Remove the bonnet Take care to valve body and sealing surface 9 Place the protection cover at valve body 10 Fasten the screw on the left by hand Protection cover 11 P...

Страница 87: ...Place the gate on a clean surface 16 Remove gate seal with the O ring removal tool 17 Clean out valve body with alcohol Use an appropriate non metal tool with clean room wiper to enter valve body Do...

Страница 88: ...seam of the o ring must be straight on the side not twisted Not OK twisted seam of the o ring OK o ring seam straight on the side Not OK twisted seam of the o ring OK no visible o ring seam after pres...

Страница 89: ...e care to valve body and sealing surface 23 Move the gate into valve body by hand 24 Dismount the protection cover at valve body Protection cover 25 If necessary replace the bonnet seal 26 Install the...

Страница 90: ...nect power cable to controller 31 Do power ON for the valve The valve move to home position 32 Enable the PFO in menu Valve Parameters Power Fail Option True and press Enter on keyboard 33 Perform a L...

Страница 91: ...ts Maintenance Tool 813330 Protection cover 833841 Clean room wiper Isopropyl alcohol Clean room gloves Description Required tool 1 Vent both valve chambers 2 Refer to chapter Local operation and foll...

Страница 92: ...bonnet screws Allen wrench 5mm 8 Remove the bonnet Take care to valve body and sealing surface 9 Place the protection cover at valve body 10 Fasten the screw on the left by hand Protection cover 11 P...

Страница 93: ...d tool 13 Loosen the gate fixation screw Open end wrench 17 mm 14 Remove the gate from valve body 15 Place the gate on a clean surface 16 Place the Maintenance Tool at actuator shaft The Maintenance T...

Страница 94: ...ent VAT do recommend two person for the next 2 steps 17 The 1st person dismounts the 4 actutor screws The 2nd person holds the Maintenance Tool at actuator shaft see step16 Allen wrench 5mm 18 The 2nd...

Страница 95: ...e O Ring in with grease and assemble it to the inner groove S1 For rotary feed through O rings refer to chapter Spare parts Vacuum grease 23 Apply a lubrication depot with 0 2ml vacuum grease on the l...

Страница 96: ...cuum grease 26 Distribute the grease with gloves around 360 27 Reassemble the actuator at valve body Allen wrench 5mm 28 Fasten the 4 actuator screws with 12 Nm Allen torque wrench 5mm 29 Clean the di...

Страница 97: ...g areas Check cleanliness with high bright LED lamp Not OK grease is visible OK whole shaft is cleaned Isopropyl alcohol Clean room wiper 33 Install the gate on the shaft 34 Push the gate down by usin...

Страница 98: ...tool until a position is reached on which the gate can be moved in Maintenance Tool Take care to valve body and sealing surface 37 Move the gate into valve body by hand 38 Dismount the protection cov...

Страница 99: ...cable to controller 43 Do power ON for the valve The valve move to home position 44 Enable the PFO in menu Valve Parameters Power Fail Option True and press Enter on keyboard 45 Perform a Leak test f...

Страница 100: ...rs under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the v...

Страница 101: ...e in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap battery Option board This graph shows estimated life of Ultra Cap PF...

Страница 102: ...epairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service c...

Страница 103: ...d work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position V...

Страница 104: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Страница 105: ...opriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care When returning products to VAT please fill...

Страница 106: ...s with a protective foil 2 Pack valve appropriately by using the original packaging material VAT disclaims any liability for damages resulting from inappropriate packaging 10 2 Transport NOTICE Inappr...

Страница 107: ...age in the case of improper handling Observe local regulations in regard to waste disposal without fail Commission an authorized waste disposal company for the professional disposal of your waste NOTI...

Страница 108: ...arts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer and those tha...

Страница 109: ...e fixation screw 6 Flange seal chamber side 7 Gate complete 10 Gate seal N 5100 275 Viton Other on request 12 Flange seal pump side 13a Rotary feedthrough vacuum lip seal N 5100 226 Viton Other on req...

Страница 110: ...376837 12 1 3 Accessories Description Part number 24 VDC power supply unit input 100 240 VAC 369877 Adapter cable for power supply unit 735567 Service cable USB A B male male PC to valve Service conn...

Страница 111: ...Series 655 APPENDIX 979645EA Edition 23 09 2019 111 112 13 Appendix...

Страница 112: ...Series 655 112 112 Edition 23 09 2019 979645EA This page left blank intentionally...

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