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DESIGN AND FUNCTION

Series 642

12/107

Edition 2017-11-24

813316EB

3.2.1

Pressure control system overview and function

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.

Example: Downstream control

1 Valve

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Controller and actuator

7 Cable to remote control unit

8 Cable to power supply

9 HV Pump

eff

Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (mbar)

p Pressure (mbar)

or units used in USA

eff

= 12.7 • Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (sccm)

p Pressure (mTorr)

Seff

Содержание 642 Series

Страница 1: ...valid for the valve ordering number s 642 GL 1 sensor input 642 GN 2 sensor inputs 642 AL 1 sensor input 15V SPS 642 AN 2 sensor inputs 15V SPS 642 HL 1 sensor input PFO 642 HN 2 sensor inputs PFO 642...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...h centering rings 19 4 3 2 Mounting with O ring in grooves 20 4 4 Admissible forces 21 4 4 1 Requirements to sensor connection 22 4 5 Electrical connection 22 4 5 1 Ground connection 23 4 5 2 Sensor s...

Страница 4: ...n 77 5 6 1 Power up 77 5 6 2 Operation 78 5 6 3 Fatal error 78 5 6 4 CC Link LEDs 78 5 6 5 Safety mode 79 5 6 6 Service indication 79 5 7 Operation during power up 80 5 8 Behavior in case of power fai...

Страница 5: ...Series 642 813316EB Edition 2017 11 24 5 107...

Страница 6: ...product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Description CPA Control Performance Analyz...

Страница 7: ...NSOR Sensor input Signal input voltage Input resistance ADC resolution Sampling time 0 10 VDC Ri 100 k linear to pressure 0 23 mV 10 ms connector SENSOR PFO 4 battery pack Charging time Durability 2 m...

Страница 8: ...ical position with extended closing time fewer cycles Process side materials body plate Stainless steel 304 1 4301 other parts Stainless steel 301 1 4310 304 1 4301 420 1 4034 420D 1 4037 430 1 4016 S...

Страница 9: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 10: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Страница 11: ...s 11 Rotary feed through seals 6 Crank bolt 3 2 Function The valve gate 1 acts as a throttling element and varies the conductance of the valve opening Actuation is performed with a stepper motor and c...

Страница 12: ...differences Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pu...

Страница 13: ...s is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proce...

Страница 14: ...ysical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it d...

Страница 15: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 16: ...space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below sample picture Overview table DN to required distance d for mainten...

Страница 17: ...ction overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Cable to remote control unit 7 Cable to power supply 8 Controller 9 Connection cable controller actua...

Страница 18: ...o the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 5 Connect pressure sensor cable 5 to sensor s and then to valve connector SENSOR Refer to...

Страница 19: ...16 17 20 30 35 55 80 13 15 22 26 41 59 25 25 NA The torque values below are dependent on many factors such as materials involved surface quality surface treatment and lubrication The torques below are...

Страница 20: ...F JIS ASA LP ISO F JIS ASA LP 63 4 N A N A N A N A N A N A 13 13 15 80 4 N A N A N A N A N A N A 13 13 15 100 4 N A N A N A N A N A N A 13 13 15 160 6 N A N A N A N A N A N A 14 14 15 200 8 N A N A N...

Страница 21: ...the valve body as specified The following forces are admissible DN nom I D Axial traction or pressure force FA Bending moment M mm inch N lbf Nm lbf ft 63 2 1960 440 78 58 80 3 1960 440 78 58 100 4 2...

Страница 22: ...e present Make also sure that there is no obstruction in front of sensor connection port inside the chamber The sensor should also be mounted free of mechanical shock and vibration Dynamic stray magne...

Страница 23: ...omized Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground s...

Страница 24: ...wer to supply 24 VDC sensors via controller o 24 VDC power to supply 24 VDC sensors externally External 24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and suppli...

Страница 25: ...ecommendation a 5AF b Safety switch min 3A Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector a...

Страница 26: ...shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector...

Страница 27: ...switch min 3A Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V 15 V at DB 15...

Страница 28: ...ch min 3A Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sen...

Страница 29: ...irst and last or last station If the valve at first or last station TR must be installed between 1 DA and 2 DB The station type for VAT valves are Version 2 Remote Device Station PE Protective Earth C...

Страница 30: ...ller sample picture 2 Prepare all parts of connector for installation All parts of connector are supplemented in a plastic bag 407612 except COMBICOM connector from valve controller 4 5 5 3 CC Link co...

Страница 31: ...B x about 40mm Pos see step 8 Knife 4 Cut off the shield wire Side cutting pliers 5 Cut off the aluminum shield and remove it Side cutting pliers 6 Cut off the plastic and remove it Take care to the w...

Страница 32: ...in the pictures see also chapter CC Link connector If valve in CC Link network is at first or last station install the CC Link cable at position A and close B with blind plug C If valve in CC Link net...

Страница 33: ...hite to 2 1 x yellow to 3 If cables at pos A B stations install 2 x blue to 1 2 x white to 2 2x yellow to 3 Screw driver size 1 13 Close the cover of connector and fasten the screws a little Pozidriv...

Страница 34: ...k wires Comment 1 DA Blue Positive RS485 RxD TxD 2 DB White Negative RS485 RxD TxD 3 DG Yellow Signal Ground 4 SLD Cable Shield 5 FG Functional Ground The CC Link interface is galvanic isolated from c...

Страница 35: ...k protocol In addition there is a digital input and a digital output Digital input may only be operated by a switch Active digital input has higher priority than CC Link commands higher priority than...

Страница 36: ...unction will indicate that the valve is closed If the function ON is configured the output is continous on Configuration can be changed in local operation via service port with CV CPA or Hyper termina...

Страница 37: ...tails 4 Sensor configuration Basic configurations of the valve must be adapted according to application needs Refer to chapter Sensor configuration for details 5 ZERO Compensation of the sensor offset...

Страница 38: ...network The station number can be configured by Control View Control Performance Analyzer or Universal Hyper Terminal The set command is s 25xxx00000 The xxx value is the station number Valid range i...

Страница 39: ...mode The operational settings mode defines the following CC Link parameters CC Link version Number of occupied stations The number of stations occupying one stations worth of memory area used by a si...

Страница 40: ...r 1 02 Pressure sensor 2 optional only in case of 2 sensor version 03 Position 04 Not used reserved 05 Not used reserved 06 Pressure setpoint 07 Position setpoint 08 Not used reserved 09 Not used rese...

Страница 41: ...ve values possible xx signal number in the buffer xx Value Default range Min Max range Default lower scale value Default upper scale value Min lower scale vlaue Max upper scale value 00 Pressure 0 1 0...

Страница 42: ...n In this case the get command i 24 add a string False Example s 24031234 56to7890 set the range of position from 1234 56 closed position to 7890 opened position Example s 24000to100 75 set the range...

Страница 43: ...B2 Do power up configuration in menu Setup Valve Do power fail configuration in menu Setup Valve It is not possible to do Valve configurations via CC Link 4 6 5 Sensor configuration Basic sensor confi...

Страница 44: ...A Do the ZERO in menu Sensor Zero With SB2 Go to menu Zero ZERO and follow instructions 1 Wait until process chamber is evacuated and sensor signal is not shifting anymore 2 In OUTPUT Buffer GENERAL C...

Страница 45: ...irectly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote oper...

Страница 46: ...WP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR required lower condu...

Страница 47: ...pressure controller Refer to chapter Pressure controller Fixed pressure controller Refer to chapter Pressure controller Soft Pump Soft Pump Refer to chapter Pressure controller Use the formula below...

Страница 48: ...tion 1 Open the CPA 2 In menu Pressure Control Setup select the Pressure controller and do the setup for pressure control algorithm parameter Refer to chapter CC Link interface commands 4 7 Tuning of...

Страница 49: ...pressure controller Normally the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each p...

Страница 50: ...ypical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Normally adjustments down to gain factors of 0 42 sho...

Страница 51: ...to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this parameter Adjustment procedure 1 Start with gain facto...

Страница 52: ...uning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response fo...

Страница 53: ...ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieved Local operation Contr...

Страница 54: ...s used if for any reason e g too long system time constant the adaptive control mode does not provide satisfying control performance In PI controller mode the parameters P gain and I gain have to be s...

Страница 55: ...on from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot and the pressure reaches SP1 asymptotically and very...

Страница 56: ...in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in just a slig...

Страница 57: ...ain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode When switching to pump down control mode the P gain value evaluated fort he PI...

Страница 58: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Страница 59: ...e Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System des...

Страница 60: ...e is independent of the CC Link handshaking That means the Network failure is inactive if the handshaking is not done yet Procedure 1 If the network parameter are correct the slave station will set th...

Страница 61: ...t flag RY m n 8 Initial data processing complete flag RX m n 9 Initial data setting complete flag RY m n 9 Initial data setting request flag RX m n A Error status flag RY m n A Error reset request fla...

Страница 62: ...s important to correct register address is used In this example the address for this slave station valve starts at 1000 hex So m 100 see capture Location of the handshaking bits The Operational settin...

Страница 63: ...eldbus cyclic acyclic data are related to any fieldbus states notation 4 9 1 OUTPUT Buffer Master PLC 4 9 1 1 Overview Data model Index Buffer Contents MSB Contents LSB 16 bit Word 0 Pressure setpoint...

Страница 64: ...MODE Position 2 the signal is used as setpoint value min signal value default 0 valve is closed max signal value default 100 000 valve is opened Signal CONTROL MODE SETPOINT 10 1 unsigned integer 2 7...

Страница 65: ...itted from the master PLC is used to check the loop master PLC VAT station See chapter 3 11 9 Communication and timing control between Master PLC and Station Valve 3 NOT USED reserved 4 ACCESS MODE LO...

Страница 66: ...Sensor 1 3 4 Pressure Sensor 2 optional only in case of 2 sensor version 5 6 Position 7 8 Not used reserved 9 10 Not used reserved Control mode 11 Fatal error 12 Not used reserved 13 14 15 16 General...

Страница 67: ...ignal adjustable1 Optional only in case of 2 sensor version In case of default valid range Physical full scale value of the sensor 10 Volt equals to 1 000 000 Signal POSITION 6 4 signed integer defaul...

Страница 68: ...has received the rising edge of Initial Data Processing Complete 1 ZERO EXECUTED ZERO successful executed active for 2 seconds 2 PING PONG RX BIT PING PONG RX BIT is inverted and transmitted back to t...

Страница 69: ...ol not possible access mode local is active change to acces mode remote or access mode locked 1 ACTUAL CONTROL MODE SETPOINT NOT ALLOWED Not possible to switch the actual control mode to CONTROL MODE...

Страница 70: ...uffer PING PONG RX BIT For visual overview see the diagram below Fieldbus Fieldbus buffer Microcontroller Ping Pong Rx Ping Pong Tx inverted Slave VAT Valve PLC Check if Ping pong Rx Ping Pong Tx inve...

Страница 71: ...NING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power before the valve is installed complet...

Страница 72: ...start software and push button LOCAL to enable for operation Then enter menu Sensor Setup and do sensor configuration according to your application to make sure that you get the correct pressure displ...

Страница 73: ...ls Control Performance Analyzer software or Service Box 2 may be used for monitoring during remote control Control Performance Analyzer software Service Box 2 In case Control Performance Analyzer soft...

Страница 74: ...Service Box 2 Remote operation Refer to chapter OUTPUT Buffer CONTROL MODE SETPOINT for details Push OPEN button 1 OUTUT Buffer CONTROL MODE SETPOINT 2 Select Open value 4 5 4 Position control The val...

Страница 75: ...the chamber pressure according to the pressure setpoint by means of the valve position The PID controller works with an adaptive algorithm to achieve best results under altering conditions gasflow ga...

Страница 76: ...ale the low range sensor is phased out while high range sensor is phased in during pressure rise During pressure decrease the high range sensor is phased out while low range sensor is phased in This m...

Страница 77: ...information for about 3s Firmware version and firmware revision e g 00 08 0 0 0 8 3 nd information for about 3s Valve type e g 642 6 4 2 4 nd information for about 3s Controller configuration In case...

Страница 78: ...position frozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D Power failure F Service request 1 valve requires cleaning S R 1 If SR is blinking...

Страница 79: ...not able to synchronize Display shows D C or D999 In this case synchronization cycle will be done when motor interlock is deactivated Then Display shows INIT for a moment followed by SYNC When safety...

Страница 80: ...r up is closed Valve position after power up is open Refer also to chapter Display information 5 8 Behavior in case of power failure Valve position before power failure Reaction of valve Without Power...

Страница 81: ...lean valve and or replace gate seal according to Maintenance procedures CLOSE VALVE does not work Safety mode active check for D on display Maintenance mode active Provide power to motor to allow for...

Страница 82: ...to motor to allow for operation Refer to Electrical connection for details PRESSURE CONTROL selected check for P on display Select PRESSURE CONTROL mode Refer to Pressure control for details LEARN don...

Страница 83: ...CV software Check Action Network failure No CC Link communication is active warning 8 CC Link cable ok Connection to master ok Check CC Link cable Check the CC Link connection to master If you need an...

Страница 84: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Страница 85: ...lve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions VAT can give the following recommendations for preventive maintenance Replacement of Recommendat...

Страница 86: ...ol Vacuum grease see chapter spare parts O ring removal tool see chapter Accessories Clean room wiper Description Required tool 1 Vent both valve chambers 2 Open the valve 3 Turn off power to valve co...

Страница 87: ...crank bolt can be reached 10 Loosen and remove the crank bolt screw Allen wrench 4 mm 11 Remove the crank bolt from lever 12 Pull out the gate assembly complete Caution Take care that gate is not scra...

Страница 88: ...ally in o ring groove for new o ring refer to chapter Spare parts 17 Clean the valve body inside Cleaning tool a little soaked with isopropyl alcohol refer to chapter Spare parts for cleaning tool 18...

Страница 89: ...en torque wrench 4 mm 22 Push in the gate assembly into valve body 23 Clean the valve bonnet Clean room wiper a little soaked with isopropyl alcohol 24 Clean or replace the bonnet seal 25 Lubricate th...

Страница 90: ...equired tool 26 Reassemble the bonnet and bonnet seal with valve 27 Fasten the bonnet screws with DN 63 100 with 10 Nm DN 160 400 with 18 Nm DN 63 100 1 Open end torque wrench 13 mm 1 Open end wrench...

Страница 91: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Страница 92: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Страница 93: ...removed All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above 7 2 3 1 Required tools Open end wrench 4 5 mm Ope...

Страница 94: ...troller Attention to ESD protection Pozidriv screw driver size1 Open end wrench 7 mm 2 Remove the panel screws Pozidriv screw driver size1 3 Remove this screws and the cover Screw driver size 2 4 Remo...

Страница 95: ...Remove or replace option board 8 Reassemble all parts in reverse order see steps 6 3 9 Tighten panel screws with 1 1 Nm see step 2 10 Reconnect all electrical connections at controller If you need any...

Страница 96: ...pairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service ce...

Страница 97: ...work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Va...

Страница 98: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Страница 99: ...ing products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vat...

Страница 100: ...EB 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclai...

Страница 101: ...AL 813316EB Edition 2017 11 24 101 107 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out th...

Страница 102: ...er for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer...

Страница 103: ...Series 642 SPARE PARTS 813316EB Edition 2017 11 24 103 107 12 1 Drawing Sample picture All Item refer to chapter Drawing...

Страница 104: ...236 478357 487706 478357 487706 711045 539937 711045 539937 707681 587193 11 Static actuator seal N 5100 222 N 5100 222 N 5100 222 N 5100 225 N 5100 225 N 5100 228 N 5100 228 N 5100 228 21 Locking bal...

Страница 105: ...602BS 29LE 000 O ring removal tool 234859 VAT valve cleaning tool 305709 12 1 3 1 Centering ring with Viton o ring Valve size Product ordering number DN 63 2 64236 DN 80 3 64238 DN 100 4 64240 Center...

Страница 106: ...APPENDIX Series 642 106 107 Edition 2017 11 24 813316EB 13 Appendix No information entered on time...

Страница 107: ...Series 642 813316EB Edition 2017 11 24 107 107 This page left blank intentionally...

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