Varian 990 dCLD II, Руководство по эксплуатации

Страница: 131 / 162

Model 990 dCLD II Component Leak Detector
A-3
?EXTLEAK A seven-character number consisting of a two-digit calibration standard leak
rate mantissa with a decimal point after the first digit followed by
E– then a
two-digit calibration standard leak rate range exponent (e.g., 1.3E-07). This
inquiry is used for reporting the external calibration standard leak rate most
recently input using INIT-EXTLEAK.
?FILAMENTBIAS Reports the filament bias voltage. The format is: FILAMENTBIAS 122.1
?FIXEDFOCUS Reports the fixed focus voltage. The format is: FIXEDFOCUS 212.7
?GAIN A three-character number consisting of a two-digit gain factor with a decimal
point after the first digit. This inquiry reports the value of the system gain.
?IONCHAMBER Reports the ion chamber voltage. The format is: IONCHAMBER 269.1
?LEAK A seven-character number consisting of a three-digit leak rate mantissa with
decimal point after the first digit followed by
E- , followed by a two-digit leak rate
range exponent (e.g., 1.35E-04).
? n REJECT A six-character number consisting of a two-digit reject leak rate mantissa with a
decimal point after the first digit followed by
E- , followed by a two-digit leak rate
range exponent (e.g., 7.0E-05). This inquiry reports the value of the requested
set point, where
n is the reject set point 1 through 4.
?OFFSET A number representing the position of the variable offset as a percent of full
scale. 50 represents mid-scale.
?PRESSURES The response begins with a <CR><LF>.
The first line consists of the words:
test port TC followed by a number of mTorr
between 0 and 760000.
The second line consists of the words:
system TC followed by a number of
mTorr between 0 and 760000.
?QUICK-CAL A response of 0 indicates NORMAL Calibration by the 990 dCLD II.
A response of 1 indicates FAST Calibration by the 990 dCLD II.
?RANGE A three-character (minus followed by two digit) number indicating the exponent
of the least sensitive range of detectable leak. The reported leak rates are in this
range and three lower (more negative exponent) ranges. Also see INIT-RANGE.
?REJECT A six-character number consisting of a two-digit reject leak rate mantissa with a
decimal point after the first digit followed by
E- , followed by a two-digit leak rate
range exponent (e.g., 7.0E-05). This inquiry used for reporting the reject leak
rate most recently input using INIT-REJECT.
?REPELLER Reports the repeller voltage. The format is: REPELLER 402.2
Table A-1 Internal Operating Parameters (Continued)
Inquiry Response